Sarakinos, K., Music, D., Mráz, S., to Baben, M., Jiang, K., Nahif, F., Braun, A., Zilkens, C., Konstantinidis, S., Renaux, F., Cossement, D., Munnik, F., Schneider, J. M. (2010) On the phase formation of sputtered hafnium oxide and oxynitride films. Journal of Applied Physics, 108 (1). 14904pp. doi:10.1063/1.3437646
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | On the phase formation of sputtered hafnium oxide and oxynitride films | ||
| Journal | Journal of Applied Physics | ||
| Authors | Sarakinos, K. | Author | |
| Music, D. | Author | ||
| Mráz, S. | Author | ||
| to Baben, M. | Author | ||
| Jiang, K. | Author | ||
| Nahif, F. | Author | ||
| Braun, A. | Author | ||
| Zilkens, C. | Author | ||
| Konstantinidis, S. | Author | ||
| Renaux, F. | Author | ||
| Cossement, D. | Author | ||
| Munnik, F. | Author | ||
| Schneider, J. M. | Author | ||
| Year | 2010 (July) | Volume | 108 |
| Issue | 1 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.3437646Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5174603 | Long-form Identifier | mindat:1:5:5174603:8 |
| GUID | 0 | ||
| Full Reference | Sarakinos, K., Music, D., Mráz, S., to Baben, M., Jiang, K., Nahif, F., Braun, A., Zilkens, C., Konstantinidis, S., Renaux, F., Cossement, D., Munnik, F., Schneider, J. M. (2010) On the phase formation of sputtered hafnium oxide and oxynitride films. Journal of Applied Physics, 108 (1). 14904pp. doi:10.1063/1.3437646 | ||
| Plain Text | Sarakinos, K., Music, D., Mráz, S., to Baben, M., Jiang, K., Nahif, F., Braun, A., Zilkens, C., Konstantinidis, S., Renaux, F., Cossement, D., Munnik, F., Schneider, J. M. (2010) On the phase formation of sputtered hafnium oxide and oxynitride films. Journal of Applied Physics, 108 (1). 14904pp. doi:10.1063/1.3437646 | ||
| In | (2010, July) Journal of Applied Physics Vol. 108 (1) AIP Publishing | ||
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