Chua, J K, Murukeshan, V M (2009) Patterning of two-dimensional nanoscale features using grating-based multiple beams interference lithography. Physica Scripta, 80 (1). 15401pp. doi:10.1088/0031-8949/80/01/015401
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Patterning of two-dimensional nanoscale features using grating-based multiple beams interference lithography | ||
Journal | Physica Scripta | ||
Authors | Chua, J K | Author | |
Murukeshan, V M | Author | ||
Year | 2009 (July) | Volume | 80 |
Issue | 1 | ||
Publisher | IOP Publishing | ||
DOI | doi:10.1088/0031-8949/80/01/015401Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5178510 | Long-form Identifier | mindat:1:5:5178510:7 |
GUID | 0 | ||
Full Reference | Chua, J K, Murukeshan, V M (2009) Patterning of two-dimensional nanoscale features using grating-based multiple beams interference lithography. Physica Scripta, 80 (1). 15401pp. doi:10.1088/0031-8949/80/01/015401 | ||
Plain Text | Chua, J K, Murukeshan, V M (2009) Patterning of two-dimensional nanoscale features using grating-based multiple beams interference lithography. Physica Scripta, 80 (1). 15401pp. doi:10.1088/0031-8949/80/01/015401 | ||
In | (2009, July) Physica Scripta Vol. 80 (1) IOP Publishing |
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