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Qin, Lifeng, Chen, Qingming, Cheng, Hongbin, Chen, Qian, Li, Jing-Feng, Wang, Qing-Ming (2011) Viscosity sensor using ZnO and AlN thin film bulk acoustic resonators with tilted polarc-axis orientations. Journal of Applied Physics, 110 (9). 94511pp. doi:10.1063/1.3657781

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Reference TypeJournal (article/letter/editorial)
TitleViscosity sensor using ZnO and AlN thin film bulk acoustic resonators with tilted polarc-axis orientations
JournalJournal of Applied Physics
AuthorsQin, LifengAuthor
Chen, QingmingAuthor
Cheng, HongbinAuthor
Chen, QianAuthor
Li, Jing-FengAuthor
Wang, Qing-MingAuthor
Year2011 (November)Volume110
Issue9
PublisherAIP Publishing
DOIdoi:10.1063/1.3657781Search in ResearchGate
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Mindat Ref. ID5187029Long-form Identifiermindat:1:5:5187029:2
GUID0
Full ReferenceQin, Lifeng, Chen, Qingming, Cheng, Hongbin, Chen, Qian, Li, Jing-Feng, Wang, Qing-Ming (2011) Viscosity sensor using ZnO and AlN thin film bulk acoustic resonators with tilted polarc-axis orientations. Journal of Applied Physics, 110 (9). 94511pp. doi:10.1063/1.3657781
Plain TextQin, Lifeng, Chen, Qingming, Cheng, Hongbin, Chen, Qian, Li, Jing-Feng, Wang, Qing-Ming (2011) Viscosity sensor using ZnO and AlN thin film bulk acoustic resonators with tilted polarc-axis orientations. Journal of Applied Physics, 110 (9). 94511pp. doi:10.1063/1.3657781
In(2011, November) Journal of Applied Physics Vol. 110 (9) AIP Publishing

See Also

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Qin, Lifeng, Wang, Qing-Ming (2010) Mass sensitivity of thin film bulk acoustic resonator sensors based on polarc-axis tilted zinc oxide and aluminum nitride thin film. Journal of Applied Physics, 108 (10). 104510pp. doi:10.1063/1.3483245
Qin, Lifeng, Wang, Qing-Ming (2010) Analysis of dual-mode thin film bulk acoustic resonators based on polar c-axis tilted wurtzite gallium nitride. Journal of Applied Physics, 107 (11). 114102pp. doi:10.1063/1.3427434
Liu, Haiqiang, Li, Fang, Qin, Lifeng, Wang, Qing-Ming (2016) Sensitivity study of multilayer thin-film bulk acoustic resonator for mass sensor application. Journal of Applied Physics, 120 (15). 154503pp. doi:10.1063/1.4965717
Chen, Qingming, Wang, Qing-Ming (2005) The effective electromechanical coupling coefficient of piezoelectric thin-film resonators. Applied Physics Letters, 86 (2). 22904pp. doi:10.1063/1.1850615
Chen, Qingming, Qin, Lifen, Wang, Qing-Ming (2007) Property characterization of AlN thin films in composite resonator structure. Journal of Applied Physics, 101 (8). 84103pp. doi:10.1063/1.2716391
Vorobiev, A., Gevorgian, S., Löffler, M., Olsson, E. (2011) Correlations between microstructure and Q-factor of tunable thin film bulk acoustic wave resonators. Journal of Applied Physics, 110 (5). 54102pp. doi:10.1063/1.3626939
Vorobiev, A., Berge, J., Gevorgian, S., Löffler, M., Olsson, E. (2011) Effect of interface roughness on acoustic loss in tunable thin film bulk acoustic wave resonators. Journal of Applied Physics, 110 (2). 24116pp. doi:10.1063/1.3610513
Yin, Ruo-Cheng, Yu, Si-Yuan, He, Cheng, Lu, Ming-Hui, Chen, Yan-Feng (2010) Bulk acoustic wave delay line in acoustic superlattice. Applied Physics Letters, 97 (9). 92905pp. doi:10.1063/1.3476350
Milyutin, Evgeny, Gentil, Sandrine, Muralt, Paul (2008) Shear mode bulk acoustic wave resonator based on c-axis oriented AlN thin film. Journal of Applied Physics, 104 (8). 84508pp. doi:10.1063/1.2996319
Chen, Mingjing; Zhen, Yangyang; Chen, Zihao; Qin, Tianchang; Liu, Haixu; Qian, Xin; Wang, Shufang (2025) Investigation of thermoelectric transport properties of c-axis oriented SnSb2Te4 thin-film fabricated using pulsed laser deposition technology. Applied Physics Letters, 126 (21). doi:10.1063/5.0265325
Vorobiev, A., Gevorgian, S. (2013) Ferroelectric film bulk acoustic wave resonators for liquid viscosity sensing. Journal of Applied Physics, 114 (8). 84106pp. doi:10.1063/1.4819327
 
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