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Kreiter, Oliver, Grosse-Kreul, Simon, Corbella, Carles, von Keudell, Achim (2013) Ion-induced oxidation of aluminum during reactive magnetron sputtering. Journal of Applied Physics, 113 (14). 143303pp. doi:10.1063/1.4799052

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Reference TypeJournal (article/letter/editorial)
TitleIon-induced oxidation of aluminum during reactive magnetron sputtering
JournalJournal of Applied Physics
AuthorsKreiter, OliverAuthor
Grosse-Kreul, SimonAuthor
Corbella, CarlesAuthor
von Keudell, AchimAuthor
Year2013 (April 14)Volume113
Issue14
PublisherAIP Publishing
DOIdoi:10.1063/1.4799052Search in ResearchGate
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Mindat Ref. ID5192014Long-form Identifiermindat:1:5:5192014:4
GUID0
Full ReferenceKreiter, Oliver, Grosse-Kreul, Simon, Corbella, Carles, von Keudell, Achim (2013) Ion-induced oxidation of aluminum during reactive magnetron sputtering. Journal of Applied Physics, 113 (14). 143303pp. doi:10.1063/1.4799052
Plain TextKreiter, Oliver, Grosse-Kreul, Simon, Corbella, Carles, von Keudell, Achim (2013) Ion-induced oxidation of aluminum during reactive magnetron sputtering. Journal of Applied Physics, 113 (14). 143303pp. doi:10.1063/1.4799052
In(2013, April) Journal of Applied Physics Vol. 113 (14) AIP Publishing

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Corbella, Carles, Grosse-Kreul, Simon, Kreiter, Oliver, de los Arcos, Teresa, Benedikt, Jan, von Keudell, Achim (2013) Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces. Review of Scientific Instruments, 84 (10). 103303pp. doi:10.1063/1.4826066
Takeuchi, Takuya, Corbella, Carles, Grosse-Kreul, Simon, von Keudell, Achim, Ishikawa, Kenji, Kondo, Hiroki, Takeda, Keigo, Sekine, Makoto, Hori, Masaru (2013) Development of the sputtering yields of ArF photoresist after the onset of argon ion bombardment. Journal of Applied Physics, 113 (1). 14306pp. doi:10.1063/1.4772996
Monje, Sascha, Corbella, Carles, von Keudell, Achim (2015) Elementary surface processes during reactive magnetron sputtering of chromium. Journal of Applied Physics, 118 (13). 133301pp. doi:10.1063/1.4932150
Kuschel, Thomas, von Keudell, Achim (2010) Ion-enhanced oxidation of aluminum as a fundamental surface process during target poisoning in reactive magnetron sputtering. Journal of Applied Physics, 107 (10). 103302pp. doi:10.1063/1.3415531
Will, Andreas, de los Arcos, Teresa, Corbella, Carles, Hecimovic, Ante, Machura, Patrick D, Winter, Jörg, von Keudell, Achim (2013) Target implantation and redeposition processes during high-power impulse magnetron sputtering of aluminum. Journal of Physics D: Applied Physics, 46. 84009pp. doi:10.1088/0022-3727/46/8/084009
Prenzel, Marina, Kortmann, Annika, Stein, Adrian, von Keudell, Achim, Nahif, Farwah, Schneider, Jochen M. (2013) Bimodal substrate biasing to control γ-Al2O3 deposition during reactive magnetron sputtering. Journal of Applied Physics, 114 (11). 113301pp. doi:10.1063/1.4819227
Hecimovic, A., Corbella, C., Maszl, C., Breilmann, W., von Keudell, A. (2017) Investigation of plasma spokes in reactive high power impulse magnetron sputtering discharge. Journal of Applied Physics, 121 (17). 171915pp. doi:10.1063/1.4978348
Corbella, Carles, Marcak, Adrian, de los Arcos, Teresa, von Keudell, Achim (2016) Revising secondary electron yields of ion-sputtered metal oxides. Journal of Physics D: Applied Physics, 49. 16pp. doi:10.1088/0022-3727/49/16/16lt01
Marcak, Adrian, Corbella, Carles, de los Arcos, Teresa, von Keudell, Achim (2015) Note: Ion-induced secondary electron emission from oxidized metal surfaces measured in a particle beam reactor. Review of Scientific Instruments, 86 (10). 106102pp. doi:10.1063/1.4932309
Layes, V., Monje, S., Corbella, C., Trieschmann, J., de los Arcos, T., von Keudell, A. (2017) Species transport on the target during high power impulse magnetron sputtering. Applied Physics Letters, 110 (8). 81603pp. doi:10.1063/1.4976999
Hecimovic, Ante, von Keudell, Achim (2018) Spokes in high power impulse magnetron sputtering plasmas. Journal of Physics D: Applied Physics, 51. 453001pp. doi:10.1088/1361-6463/aadaa1
 
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