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Guo, X., Jakes, J. E., Banna, S., Nishi, Y., Shohet, J. L. (2014) Effects of plasma and vacuum-ultraviolet exposure on the mechanical properties of low-k porous organosilicate glass. Journal of Applied Physics, 116 (4). 44103pp. doi:10.1063/1.4891501

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Reference TypeJournal (article/letter/editorial)
TitleEffects of plasma and vacuum-ultraviolet exposure on the mechanical properties of low-k porous organosilicate glass
JournalJournal of Applied Physics
AuthorsGuo, X.Author
Jakes, J. E.Author
Banna, S.Author
Nishi, Y.Author
Shohet, J. L.Author
Year2014 (July 28)Volume116
Issue4
PublisherAIP Publishing
DOIdoi:10.1063/1.4891501Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5200010Long-form Identifiermindat:1:5:5200010:0
GUID0
Full ReferenceGuo, X., Jakes, J. E., Banna, S., Nishi, Y., Shohet, J. L. (2014) Effects of plasma and vacuum-ultraviolet exposure on the mechanical properties of low-k porous organosilicate glass. Journal of Applied Physics, 116 (4). 44103pp. doi:10.1063/1.4891501
Plain TextGuo, X., Jakes, J. E., Banna, S., Nishi, Y., Shohet, J. L. (2014) Effects of plasma and vacuum-ultraviolet exposure on the mechanical properties of low-k porous organosilicate glass. Journal of Applied Physics, 116 (4). 44103pp. doi:10.1063/1.4891501
In(2014, July) Journal of Applied Physics Vol. 116 (4) AIP Publishing

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Guo, X., Jakes, J. E., Nichols, M. T., Banna, S., Nishi, Y., Shohet, J. L. (2013) The effect of water uptake on the mechanical properties of low-k organosilicate glass. Journal of Applied Physics, 114 (8). 84103pp. doi:10.1063/1.4817917
Ren, H., Antonelli, G. A., Nishi, Y., Shohet, J. L. (2010) Plasma damage effects on low-k porous organosilicate glass. Journal of Applied Physics, 108 (9). 94110pp. doi:10.1063/1.3506523
Zheng, H., King, S. W., Ryan, V., Nishi, Y., Shohet, J. L. (2014) Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation. Applied Physics Letters, 104 (6). 62904pp. doi:10.1063/1.4865407
Zheng, H., Guo, X., Pei, D., Ryan, E. T., Nishi, Y., Shohet, J. L. (2015) Effects of vacuum ultraviolet irradiation on trapped charges and leakage currents of low-k organosilicate dielectrics. Applied Physics Letters, 106 (19). 192905pp. doi:10.1063/1.4921271
Zheng, H., Ryan, E. T., Nishi, Y., Shohet, J. L. (2014) Effect of vacuum-ultraviolet irradiation on the dielectric constant of low-k organosilicate dielectrics. Applied Physics Letters, 105 (20). 202902pp. doi:10.1063/1.4901742
Sinha, H., Lauer, J. L., Nichols, M. T., Antonelli, G. A., Nishi, Y., Shohet, J. L. (2010) Effect of vacuum ultraviolet and ultraviolet Irradiation on capacitance-voltage characteristics of low-k-porous organosilicate dielectrics. Applied Physics Letters, 96 (5). 52901pp. doi:10.1063/1.3306729
Ren, H., Jiang, G., Antonelli, G. A., Nishi, Y., Shohet, J. L. (2011) The nature of the defects generated from plasma exposure in pristine and ultraviolet-cured low-k organosilicate glass. Applied Physics Letters, 98 (25). 252902pp. doi:10.1063/1.3601922
Zheng, H., Nichols, M. T., Pei, D., Nishi, Y., Shohet, J. L. (2013) Surface photoconductivity of organosilicate glass dielectrics induced by vacuum-ultraviolet radiation. Journal of Applied Physics, 114 (6). 64104pp. doi:10.1063/1.4817427
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Guo, X., King, S. W., Zheng, H., Xue, P., Nishi, Y., Shohet, J. L. (2015) Effects of vacuum-ultraviolet irradiation on copper penetration into low-k dielectrics under bias-temperature stress. Applied Physics Letters, 106 (1). 12904pp. doi:10.1063/1.4905462
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