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Ren, Jiaqi, Liu, Pinkuan, Zhu, Xiaobo, Zhang, Fan, Chen, Guozhen (2014) Multiscale modeling and experimental validation for nanochannel depth control in atomic force microscopy-based nanofabrication. Journal of Applied Physics, 116 (7). 74301pp. doi:10.1063/1.4893184

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Reference TypeJournal (article/letter/editorial)
TitleMultiscale modeling and experimental validation for nanochannel depth control in atomic force microscopy-based nanofabrication
JournalJournal of Applied Physics
AuthorsRen, JiaqiAuthor
Liu, PinkuanAuthor
Zhu, XiaoboAuthor
Zhang, FanAuthor
Chen, GuozhenAuthor
Year2014 (August 21)Volume116
Issue7
PublisherAIP Publishing
DOIdoi:10.1063/1.4893184Search in ResearchGate
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Mindat Ref. ID5200251Long-form Identifiermindat:1:5:5200251:5
GUID0
Full ReferenceRen, Jiaqi, Liu, Pinkuan, Zhu, Xiaobo, Zhang, Fan, Chen, Guozhen (2014) Multiscale modeling and experimental validation for nanochannel depth control in atomic force microscopy-based nanofabrication. Journal of Applied Physics, 116 (7). 74301pp. doi:10.1063/1.4893184
Plain TextRen, Jiaqi, Liu, Pinkuan, Zhu, Xiaobo, Zhang, Fan, Chen, Guozhen (2014) Multiscale modeling and experimental validation for nanochannel depth control in atomic force microscopy-based nanofabrication. Journal of Applied Physics, 116 (7). 74301pp. doi:10.1063/1.4893184
In(2014, August) Journal of Applied Physics Vol. 116 (7) AIP Publishing

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