Hans, M., to Baben, M., Music, D., Ebenhöch, J., Primetzhofer, D., Kurapov, D., Arndt, M., Rudigier, H., Schneider, J. M. (2014) Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering. Journal of Applied Physics, 116 (9). 93515pp. doi:10.1063/1.4894776
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering | ||
| Journal | Journal of Applied Physics | ||
| Authors | Hans, M. | Author | |
| to Baben, M. | Author | ||
| Music, D. | Author | ||
| Ebenhöch, J. | Author | ||
| Primetzhofer, D. | Author | ||
| Kurapov, D. | Author | ||
| Arndt, M. | Author | ||
| Rudigier, H. | Author | ||
| Schneider, J. M. | Author | ||
| Year | 2014 (September 7) | Volume | 116 |
| Issue | 9 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.4894776Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5200447 | Long-form Identifier | mindat:1:5:5200447:0 |
| GUID | 0 | ||
| Full Reference | Hans, M., to Baben, M., Music, D., Ebenhöch, J., Primetzhofer, D., Kurapov, D., Arndt, M., Rudigier, H., Schneider, J. M. (2014) Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering. Journal of Applied Physics, 116 (9). 93515pp. doi:10.1063/1.4894776 | ||
| Plain Text | Hans, M., to Baben, M., Music, D., Ebenhöch, J., Primetzhofer, D., Kurapov, D., Arndt, M., Rudigier, H., Schneider, J. M. (2014) Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering. Journal of Applied Physics, 116 (9). 93515pp. doi:10.1063/1.4894776 | ||
| In | (2014, September) Journal of Applied Physics Vol. 116 (9) AIP Publishing | ||
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