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Upadhyay, J., Im, Do, Popović, S., Valente-Feliciano, A.-M., Phillips, L., Vušković, L. (2015) Etching mechanism of niobium in coaxial Ar/Cl2 radio frequency plasma. Journal of Applied Physics, 117 (11). 113301pp. doi:10.1063/1.4914298

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Reference TypeJournal (article/letter/editorial)
TitleEtching mechanism of niobium in coaxial Ar/Cl2 radio frequency plasma
JournalJournal of Applied Physics
AuthorsUpadhyay, J.Author
Im, DoAuthor
Popović, S.Author
Valente-Feliciano, A.-M.Author
Phillips, L.Author
Vušković, L.Author
Year2015 (March 21)Volume117
Issue11
PublisherAIP Publishing
DOIdoi:10.1063/1.4914298Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5200629Long-form Identifiermindat:1:5:5200629:2
GUID0
Full ReferenceUpadhyay, J., Im, Do, Popović, S., Valente-Feliciano, A.-M., Phillips, L., Vušković, L. (2015) Etching mechanism of niobium in coaxial Ar/Cl2 radio frequency plasma. Journal of Applied Physics, 117 (11). 113301pp. doi:10.1063/1.4914298
Plain TextUpadhyay, J., Im, Do, Popović, S., Valente-Feliciano, A.-M., Phillips, L., Vušković, L. (2015) Etching mechanism of niobium in coaxial Ar/Cl2 radio frequency plasma. Journal of Applied Physics, 117 (11). 113301pp. doi:10.1063/1.4914298
In(2015, March) Journal of Applied Physics Vol. 117 (11) AIP Publishing

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Upadhyay, J., Im, Do, Peshl, J., Bašović, M., Popović, S., Valente-Feliciano, A.-M., Phillips, L., Vušković, L. (2016) Apparatus and method for plasma processing of SRF cavities. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 818. 76-81 doi:10.1016/j.nima.2016.02.049
Popović, S., Upadhyay, J., Mammosser, J., Nikolić, M., Vušković, L. (2014) Resonant-frequency discharge in a multi-cell radio frequency cavity. Journal of Applied Physics, 116 (17). 173301pp. doi:10.1063/1.4900994
Rašković, M., Vušković, L., Popović, S., Phillips, L., Valente-Feliciano, A.-M., Radovanov, S.B., Godet, L. (2006) Plasma treatment of bulk niobium surface for SRF cavities. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 569 (3). 663-670 doi:10.1016/j.nima.2006.09.038
Drake, D. J., Popović, S., Vušković, L. (2009) Characterization of a CO2/N2/Ar supersonic flowing discharge. Journal of Applied Physics, 106 (8). 83305pp. doi:10.1063/1.3246870
Drake, D. J., Popović, S., Vušković, L. (2008) Characterization of a supersonic microwave discharge in Ar/H2/Air mixtures. Journal of Applied Physics, 104 (6). 63305pp. doi:10.1063/1.2980278
Nikolić, M., Newton, J., Sukenik, C. I., Vušković, L., Popović, S. (2015) Measurements of population densities of metastable and resonant levels of argon using laser induced fluorescence. Journal of Applied Physics, 117 (2). 23304pp. doi:10.1063/1.4905611
Nikolić, M., Popović, S., Vušković, L., Herring, G. C., Exton, R. J. (2011) Electron density measurements in a pulse-repetitive microwave discharge in air. Journal of Applied Physics, 110 (11). 113304pp. doi:10.1063/1.3665195
Kuryatkov, V., Borisov, B., Saxena, J., Nikishin, S. A., Temkin, H., Patibandla, S., Menon, L., Holtz, M. (2005) Analysis of nonselective plasma etching of AlGaN by CF4∕Ar∕Cl2. Journal of Applied Physics, 97 (7). 73302pp. doi:10.1063/1.1866490
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