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Li, Han, Lin, Kevin, Ege, Canay (2015) Buffer layer structure for measuring the elastic properties of brittle thin films by nanoindentation with application on nanoporous low-k dielectrics. Journal of Applied Physics, 117 (11). 115303pp. doi:10.1063/1.4915945

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Reference TypeJournal (article/letter/editorial)
TitleBuffer layer structure for measuring the elastic properties of brittle thin films by nanoindentation with application on nanoporous low-k dielectrics
JournalJournal of Applied Physics
AuthorsLi, HanAuthor
Lin, KevinAuthor
Ege, CanayAuthor
Year2015 (March 21)Volume117
Issue11
PublisherAIP Publishing
DOIdoi:10.1063/1.4915945Search in ResearchGate
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Mindat Ref. ID5200678Long-form Identifiermindat:1:5:5200678:8
GUID0
Full ReferenceLi, Han, Lin, Kevin, Ege, Canay (2015) Buffer layer structure for measuring the elastic properties of brittle thin films by nanoindentation with application on nanoporous low-k dielectrics. Journal of Applied Physics, 117 (11). 115303pp. doi:10.1063/1.4915945
Plain TextLi, Han, Lin, Kevin, Ege, Canay (2015) Buffer layer structure for measuring the elastic properties of brittle thin films by nanoindentation with application on nanoporous low-k dielectrics. Journal of Applied Physics, 117 (11). 115303pp. doi:10.1063/1.4915945
In(2015, March) Journal of Applied Physics Vol. 117 (11) AIP Publishing

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