Grojo, David, Mouskeftaras, Alexandros, Delaporte, Philippe, Lei, Shuting (2015) Limitations to laser machining of silicon using femtosecond micro-Bessel beams in the infrared. Journal of Applied Physics, 117 (15). 153105pp. doi:10.1063/1.4918669
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Limitations to laser machining of silicon using femtosecond micro-Bessel beams in the infrared | ||
Journal | Journal of Applied Physics | ||
Authors | Grojo, David | Author | |
Mouskeftaras, Alexandros | Author | ||
Delaporte, Philippe | Author | ||
Lei, Shuting | Author | ||
Year | 2015 (April 21) | Volume | 117 |
Issue | 15 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.4918669Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5200908 | Long-form Identifier | mindat:1:5:5200908:6 |
GUID | 0 | ||
Full Reference | Grojo, David, Mouskeftaras, Alexandros, Delaporte, Philippe, Lei, Shuting (2015) Limitations to laser machining of silicon using femtosecond micro-Bessel beams in the infrared. Journal of Applied Physics, 117 (15). 153105pp. doi:10.1063/1.4918669 | ||
Plain Text | Grojo, David, Mouskeftaras, Alexandros, Delaporte, Philippe, Lei, Shuting (2015) Limitations to laser machining of silicon using femtosecond micro-Bessel beams in the infrared. Journal of Applied Physics, 117 (15). 153105pp. doi:10.1063/1.4918669 | ||
In | (2015, April) Journal of Applied Physics Vol. 117 (15) AIP Publishing |
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