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Sahu, B. B., Han, Jeon G., Hori, Masaru, Takeda, Keigo (2015) Langmuir probe and optical emission spectroscopy studies in magnetron sputtering plasmas for Al-doped ZnO film deposition. Journal of Applied Physics, 117 (2). 23301pp. doi:10.1063/1.4905541

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Reference TypeJournal (article/letter/editorial)
TitleLangmuir probe and optical emission spectroscopy studies in magnetron sputtering plasmas for Al-doped ZnO film deposition
JournalJournal of Applied Physics
AuthorsSahu, B. B.Author
Han, Jeon G.Author
Hori, MasaruAuthor
Takeda, KeigoAuthor
Year2015 (January 14)Volume117
Issue2
PublisherAIP Publishing
DOIdoi:10.1063/1.4905541Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5201744Long-form Identifiermindat:1:5:5201744:7
GUID0
Full ReferenceSahu, B. B., Han, Jeon G., Hori, Masaru, Takeda, Keigo (2015) Langmuir probe and optical emission spectroscopy studies in magnetron sputtering plasmas for Al-doped ZnO film deposition. Journal of Applied Physics, 117 (2). 23301pp. doi:10.1063/1.4905541
Plain TextSahu, B. B., Han, Jeon G., Hori, Masaru, Takeda, Keigo (2015) Langmuir probe and optical emission spectroscopy studies in magnetron sputtering plasmas for Al-doped ZnO film deposition. Journal of Applied Physics, 117 (2). 23301pp. doi:10.1063/1.4905541
In(2015, January) Journal of Applied Physics Vol. 117 (2) AIP Publishing

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Sahu, B. B., Han, Jeon G., Kim, Hye R., Ishikawa, K., Hori, M. (2015) Experimental evidence of warm electron populations in magnetron sputtering plasmas. Journal of Applied Physics, 117 (3). 33301pp. doi:10.1063/1.4905901
Shin, Kyung Sik, Sahu, Bibhuti Bhusan, Han, Jeon Geon, Hori, Masaru (2015) Effectiveness of hydrogen dilution for designing amorphous to crystalline Si thin film in inductively coupled plasma assisted magnetron sputtering. Japanese Journal of Applied Physics, 54 (6) 60303 doi:10.7567/jjap.54.060303
Sahu, B. B., Shin, Kyung Sik, Jin, Su. B., Han, Jeon G., Ishikawa, K., Hori, M. (2014) Effectiveness of plasma diagnostic in ultra high frequency and radio frequency hybrid plasmas for synthesis of silicon nitride film at low temperature. Journal of Applied Physics, 116 (13). 134903pp. doi:10.1063/1.4896833
Abe, Yusuke, Fukushima, Atsushi, Takeda, Keigo, Kondo, Hiroki, Ishikawa, Kenji, Sekine, Makoto, Hori, Masaru (2012) Critical flux ratio of hydrogen radical to film precursor in microcrystalline silicon deposition for solar cells. Applied Physics Letters, 101 (17). 172109pp. doi:10.1063/1.4764065
Shin, Kyung Sik, Sahu, Bibhuti Bhusan, Han, Jeon Geon, Hori, Masaru (2015) Utility of dual frequency hybrid source for plasma and radical generation in plasma enhanced chemical vapor deposition process. Japanese Journal of Applied Physics, 54 (7) 76201 doi:10.7567/jjap.54.076201
Kim, Hye R., Kim, Jay B., Choi, Yoon S., Hori, M., Han, Jeon G. (2015) Electrical, Optical and Structural Properties of AZO Thin Film Deposited Using Facing Targets Magnetron Sputtering System with Inductively Coupled Plasma. Science of Advanced Materials, 7. 107-112 doi:10.1166/sam.2015.2088
Kumar, Manish, Wen, Long, Sahu, Bibhuti B., Han, Jeon Geon (2015) Simultaneous enhancement of carrier mobility and concentration via tailoring of Al-chemical states in Al-ZnO thin films. Applied Physics Letters, 106 (24). 241903pp. doi:10.1063/1.4922732
Minami, Tadatsugu, Miyata, Toshihiro, Ohtani, Yuusuke, Mochizuki, Yuu (2006) New Transparent Conducting Al-doped ZnO Film Preparation Techniques for Improving Resistivity Distribution in Magnetron Sputtering Deposition. Japanese Journal of Applied Physics, 45. doi:10.1143/jjap.45.l409
Sahu, Bibhuti B., Kim, Sung I., Lee, Min W., Han, Jeon G. (2020) Effect of helium incorporation on plasma parameters and characteristic properties of hydrogen free carbon films deposited using DC magnetron sputtering. Journal of Applied Physics, 127 (1). 14901pp. doi:10.1063/1.5115449
Sahu, Bibhuti Bhusan, Jin, Su Bong, Xiang, Piao Jin, Kim, Jay Bum, Han, Jeon Geon (2018) Effect of inductively coupled plasma and plasma parameters on magnetron sputtered Al-Doped ZnO highly conductive thin films at low-temperature. Journal of Applied Physics, 123 (20). 205107pp. doi:10.1063/1.5022708
Singh, C. C., Patel, T. A., Panda, E. (2015) Relation between surface and bulk electronic properties of Al doped ZnO films deposited at varying substrate temperature by radio frequency magnetron sputtering. Journal of Applied Physics, 117 (24). 245312pp. doi:10.1063/1.4923224
 
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