Knebel, Steve, Pešić, Milan, Cho, Kyuho, Chang, Jaewan, Lim, Hanjin, Kolomiiets, Nadiia, Afanas'ev, Valeri V., Muehle, Uwe, Schroeder, Uwe, Mikolajick, Thomas (2015) Ultra-thin ZrO2/SrO/ZrO2 insulating stacks for future dynamic random access memory capacitor applications. Journal of Applied Physics, 117 (22). 224102pp. doi:10.1063/1.4922349
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Ultra-thin ZrO2/SrO/ZrO2 insulating stacks for future dynamic random access memory capacitor applications | ||
Journal | Journal of Applied Physics | ||
Authors | Knebel, Steve | Author | |
Pešić, Milan | Author | ||
Cho, Kyuho | Author | ||
Chang, Jaewan | Author | ||
Lim, Hanjin | Author | ||
Kolomiiets, Nadiia | Author | ||
Afanas'ev, Valeri V. | Author | ||
Muehle, Uwe | Author | ||
Schroeder, Uwe | Author | ||
Mikolajick, Thomas | Author | ||
Year | 2015 (June 14) | Volume | 117 |
Issue | 22 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.4922349Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5201945 | Long-form Identifier | mindat:1:5:5201945:4 |
GUID | 0 | ||
Full Reference | Knebel, Steve, Pešić, Milan, Cho, Kyuho, Chang, Jaewan, Lim, Hanjin, Kolomiiets, Nadiia, Afanas'ev, Valeri V., Muehle, Uwe, Schroeder, Uwe, Mikolajick, Thomas (2015) Ultra-thin ZrO2/SrO/ZrO2 insulating stacks for future dynamic random access memory capacitor applications. Journal of Applied Physics, 117 (22). 224102pp. doi:10.1063/1.4922349 | ||
Plain Text | Knebel, Steve, Pešić, Milan, Cho, Kyuho, Chang, Jaewan, Lim, Hanjin, Kolomiiets, Nadiia, Afanas'ev, Valeri V., Muehle, Uwe, Schroeder, Uwe, Mikolajick, Thomas (2015) Ultra-thin ZrO2/SrO/ZrO2 insulating stacks for future dynamic random access memory capacitor applications. Journal of Applied Physics, 117 (22). 224102pp. doi:10.1063/1.4922349 | ||
In | (2015, June) Journal of Applied Physics Vol. 117 (22) AIP Publishing |
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