Bogan, J., Lundy, R., P. McCoy, A., O'Connor, R., Byrne, C., Walsh, L., Casey, P., Hughes, G. (2016) In-situ surface and interface study of atomic oxygen modified carbon containing porous low-κ dielectric films for barrier layer applications. Journal of Applied Physics, 120 (10). 105305pp. doi:10.1063/1.4962371
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | In-situ surface and interface study of atomic oxygen modified carbon containing porous low-κ dielectric films for barrier layer applications | ||
| Journal | Journal of Applied Physics | ||
| Authors | Bogan, J. | Author | |
| Lundy, R. | Author | ||
| P. McCoy, A. | Author | ||
| O'Connor, R. | Author | ||
| Byrne, C. | Author | ||
| Walsh, L. | Author | ||
| Casey, P. | Author | ||
| Hughes, G. | Author | ||
| Year | 2016 (September 14) | Volume | 120 |
| Issue | 10 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.4962371Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5205158 | Long-form Identifier | mindat:1:5:5205158:4 |
| GUID | 0 | ||
| Full Reference | Bogan, J., Lundy, R., P. McCoy, A., O'Connor, R., Byrne, C., Walsh, L., Casey, P., Hughes, G. (2016) In-situ surface and interface study of atomic oxygen modified carbon containing porous low-κ dielectric films for barrier layer applications. Journal of Applied Physics, 120 (10). 105305pp. doi:10.1063/1.4962371 | ||
| Plain Text | Bogan, J., Lundy, R., P. McCoy, A., O'Connor, R., Byrne, C., Walsh, L., Casey, P., Hughes, G. (2016) In-situ surface and interface study of atomic oxygen modified carbon containing porous low-κ dielectric films for barrier layer applications. Journal of Applied Physics, 120 (10). 105305pp. doi:10.1063/1.4962371 | ||
| In | (2016, September) Journal of Applied Physics Vol. 120 (10) AIP Publishing | ||
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