McGilvery, C M, McComb, D W, MacKenzie, M, Craven, A J, McFadzean, S, Gendt, S D (2008) Analysis of hafnium containing powders and thin films for CMOS device applications. Journal of Physics: Conference Series, 126. 12003pp. doi:10.1088/1742-6596/126/1/012003
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Analysis of hafnium containing powders and thin films for CMOS device applications | ||
Journal | Journal of Physics: Conference Series | ||
Authors | McGilvery, C M | Author | |
McComb, D W | Author | ||
MacKenzie, M | Author | ||
Craven, A J | Author | ||
McFadzean, S | Author | ||
Gendt, S D | Author | ||
Year | 2008 (August 1) | Volume | 126 |
Publisher | IOP Publishing | ||
DOI | doi:10.1088/1742-6596/126/1/012003Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5222023 | Long-form Identifier | mindat:1:5:5222023:6 |
GUID | 0 | ||
Full Reference | McGilvery, C M, McComb, D W, MacKenzie, M, Craven, A J, McFadzean, S, Gendt, S D (2008) Analysis of hafnium containing powders and thin films for CMOS device applications. Journal of Physics: Conference Series, 126. 12003pp. doi:10.1088/1742-6596/126/1/012003 | ||
Plain Text | McGilvery, C M, McComb, D W, MacKenzie, M, Craven, A J, McFadzean, S, Gendt, S D (2008) Analysis of hafnium containing powders and thin films for CMOS device applications. Journal of Physics: Conference Series, 126. 12003pp. doi:10.1088/1742-6596/126/1/012003 | ||
In | (2008) Journal of Physics: Conference Series Vol. 126. IOP Publishing |
See Also
These are possibly similar items as determined by title/reference text matching only.