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Kerr, G L, Cox, D C, Stolojan, V, Silva, S R P (2008) Characterisation of electron-beam deposited tungsten interconnects. Journal of Physics: Conference Series, 126. 12073pp. doi:10.1088/1742-6596/126/1/012073

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Reference TypeJournal (article/letter/editorial)
TitleCharacterisation of electron-beam deposited tungsten interconnects
JournalJournal of Physics: Conference Series
AuthorsKerr, G LAuthor
Cox, D CAuthor
Stolojan, VAuthor
Silva, S R PAuthor
Year2008 (August 1)Volume126
PublisherIOP Publishing
DOIdoi:10.1088/1742-6596/126/1/012073Search in ResearchGate
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Mindat Ref. ID5222092Long-form Identifiermindat:1:5:5222092:6
GUID0
Full ReferenceKerr, G L, Cox, D C, Stolojan, V, Silva, S R P (2008) Characterisation of electron-beam deposited tungsten interconnects. Journal of Physics: Conference Series, 126. 12073pp. doi:10.1088/1742-6596/126/1/012073
Plain TextKerr, G L, Cox, D C, Stolojan, V, Silva, S R P (2008) Characterisation of electron-beam deposited tungsten interconnects. Journal of Physics: Conference Series, 126. 12073pp. doi:10.1088/1742-6596/126/1/012073
In(2008) Journal of Physics: Conference Series Vol. 126. IOP Publishing

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