Riedo, A., Grimaudo, V., Moreno-García, P., Neuland, M. B., Tulej, M., Wurz, P., Broekmann, P. (2015) High depth-resolution laser ablation chemical analysis of additive-assisted Cu electroplating for microchip architectures. Journal of Analytical Atomic Spectrometry, 30 (12). 2371-2374 doi:10.1039/c5ja00295h
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | High depth-resolution laser ablation chemical analysis of additive-assisted Cu electroplating for microchip architectures | ||
Journal | Journal of Analytical Atomic Spectrometry | ||
Authors | Riedo, A. | Author | |
Grimaudo, V. | Author | ||
Moreno-García, P. | Author | ||
Neuland, M. B. | Author | ||
Tulej, M. | Author | ||
Wurz, P. | Author | ||
Broekmann, P. | Author | ||
Year | 2015 | Volume | 30 |
Issue | 12 | ||
Publisher | Royal Society of Chemistry (RSC) | ||
DOI | doi:10.1039/c5ja00295hSearch in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5342891 | Long-form Identifier | mindat:1:5:5342891:4 |
GUID | 0 | ||
Full Reference | Riedo, A., Grimaudo, V., Moreno-García, P., Neuland, M. B., Tulej, M., Wurz, P., Broekmann, P. (2015) High depth-resolution laser ablation chemical analysis of additive-assisted Cu electroplating for microchip architectures. Journal of Analytical Atomic Spectrometry, 30 (12). 2371-2374 doi:10.1039/c5ja00295h | ||
Plain Text | Riedo, A., Grimaudo, V., Moreno-García, P., Neuland, M. B., Tulej, M., Wurz, P., Broekmann, P. (2015) High depth-resolution laser ablation chemical analysis of additive-assisted Cu electroplating for microchip architectures. Journal of Analytical Atomic Spectrometry, 30 (12). 2371-2374 doi:10.1039/c5ja00295h | ||
In | (2015) Journal of Analytical Atomic Spectrometry Vol. 30 (12) Royal Society of Chemistry (RSC) |
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