Rothenberg, Joshua E., Kelly, Roger (1984) Laser sputtering. Part II. The mechanism of the sputtering of Al2O3. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1 (2). 291-300 doi:10.1016/0168-583x(84)90083-1
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Laser sputtering. Part II. The mechanism of the sputtering of Al2O3 | ||
| Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
| Authors | Rothenberg, Joshua E. | Author | |
| Kelly, Roger | Author | ||
| Year | 1984 (February) | Volume | 1 |
| Issue | 2 | ||
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/0168-583x(84)90083-1Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5581475 | Long-form Identifier | mindat:1:5:5581475:3 |
| GUID | 0 | ||
| Full Reference | Rothenberg, Joshua E., Kelly, Roger (1984) Laser sputtering. Part II. The mechanism of the sputtering of Al2O3. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1 (2). 291-300 doi:10.1016/0168-583x(84)90083-1 | ||
| Plain Text | Rothenberg, Joshua E., Kelly, Roger (1984) Laser sputtering. Part II. The mechanism of the sputtering of Al2O3. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1 (2). 291-300 doi:10.1016/0168-583x(84)90083-1 | ||
| In | (1984, February) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 1 (2) Elsevier BV | ||
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