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Yabe, E., Takeshiro, S., Sunako, K., Takayama, K., Fukui, R., Takagi, K., Okamoto, K., Komiya, S. (1985) An ion source with plasma generator. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 119-122 doi:10.1016/0168-583x(85)90620-2

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Reference TypeJournal (article/letter/editorial)
TitleAn ion source with plasma generator
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsYabe, E.Author
Takeshiro, S.Author
Sunako, K.Author
Takayama, K.Author
Fukui, R.Author
Takagi, K.Author
Okamoto, K.Author
Komiya, S.Author
Year1985 (January)Volume6
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(85)90620-2Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5583316Long-form Identifiermindat:1:5:5583316:5
GUID0
Full ReferenceYabe, E., Takeshiro, S., Sunako, K., Takayama, K., Fukui, R., Takagi, K., Okamoto, K., Komiya, S. (1985) An ion source with plasma generator. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 119-122 doi:10.1016/0168-583x(85)90620-2
Plain TextYabe, E., Takeshiro, S., Sunako, K., Takayama, K., Fukui, R., Takagi, K., Okamoto, K., Komiya, S. (1985) An ion source with plasma generator. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 119-122 doi:10.1016/0168-583x(85)90620-2
In(1985, January) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 6 (1) Elsevier BV

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Tonegawa, A., Yabe, E., Satoh, D., Sunako, K., Takayama, K., Takagi, K., Fukui, R., Okamoto, K., Komiya, S. (1985) Simple hollow cathode ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 129-132 doi:10.1016/0168-583x(85)90622-6
Tonegawa, A., Shimoyama, T., Yabe, E., Takayama, K., Takagi, K., Fukui, R., Kikuchi, R., Okamoto, K., Komiya, S. (1987) Plasma compression type hollow cathode ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 212-214 doi:10.1016/0168-583x(87)90829-9
Yabe, E., Ishizaka, N., Shibuya, T., Tonegawa, A., Takayama, K., Fukui, R., Takagi, K., Kikuchi, R., Okamoto, K., Komiya, S. (1987) Plasma filament ion source for high current implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 190-193 doi:10.1016/0168-583x(87)90823-8
Yabe, E., Takahashi, K., Takagi, K., Takayama, K. (1992) Oxygen ion source with plasma cathode. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 70 (1). 208-212 doi:10.1016/0168-583x(92)95933-i
Fukui, R., Takagi, K., Tsugueda, T., Tsuboi, H., Kikuchi, R., Yabe, E., Takayama, K. (1989) Long life plasma filament type ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 140-142 doi:10.1016/0168-583x(89)90153-5
Nanri, K., Arai, K., Matsubara, A., Sunako, K., Tanikawa, T., Yabe, E., Kawamura, K., Takayama, K., Yamauchi, K. (1992) Isotope separation in a magnetized sheet plasma by ion cyclotron resonance. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 70 (1). 37-39 doi:10.1016/0168-583x(92)95906-8
Shiono, T., Shibuya, T., Harano, Y., Yabe, E., Takayama, K. (1989) Ion source with plasma cathode for ion assisted deposition. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 166-168 doi:10.1016/0168-583x(89)90160-2
Isoya, A., Miyake, Y., Takagi, K., Uchiyama, T., Yui, K., Kikuchi, R., Komiya, S., Hayashi, C. (1985) 1 MV rotating-disc type high voltage generator for application to an implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 250-257 doi:10.1016/0168-583x(85)90642-1
Shibuya, Takehisa, Hashimoto, Shizuyo, Yabe, Eiji, Takayama, Kazuo (1991) Plasma cathode oxygen ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 305-309 doi:10.1016/0168-583x(91)96182-k
Takagi, K., Tsugueda, T., Fukui, R., Tsuboi, H., Katagawa, T., Yamakawa, H., Hoshino, A., Agawa, Y., Kikuchi, R., Takayama, K. (1989) A high current sheet plasma ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 169-172 doi:10.1016/0168-583x(89)90161-4
Sunako, Katsuhiko, Nanri, Kenzo, Noguchi, Takeshi, Yabe, Eiji, Takayama, Kazuo (1996) Production of sheet plasma using a TP-D plasma source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 111 (1). 151-156 doi:10.1016/0168-583x(95)01254-0
 
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