Adler, R.J., Picraux, S.T. (1985) Repetitively pulsed metal ion beams for ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 123-128 doi:10.1016/0168-583x(85)90621-4
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Repetitively pulsed metal ion beams for ion implantation | ||
Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
Authors | Adler, R.J. | Author | |
Picraux, S.T. | Author | ||
Year | 1985 (January) | Volume | 6 |
Issue | 1 | ||
Publisher | Elsevier BV | ||
DOI | doi:10.1016/0168-583x(85)90621-4Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5583320 | Long-form Identifier | mindat:1:5:5583320:8 |
GUID | 0 | ||
Full Reference | Adler, R.J., Picraux, S.T. (1985) Repetitively pulsed metal ion beams for ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 123-128 doi:10.1016/0168-583x(85)90621-4 | ||
Plain Text | Adler, R.J., Picraux, S.T. (1985) Repetitively pulsed metal ion beams for ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 123-128 doi:10.1016/0168-583x(85)90621-4 | ||
In | (1985, January) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 6 (1) Elsevier BV |
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