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Evans, David C. (1987) A generalized mathematical model for wafer cooling with gas. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 385-390 doi:10.1016/0168-583x(87)90862-7

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Reference TypeJournal (article/letter/editorial)
TitleA generalized mathematical model for wafer cooling with gas
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsEvans, David C.Author
Year1987 (January)Volume21
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(87)90862-7Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5588150Long-form Identifiermindat:1:5:5588150:6
GUID0
Full ReferenceEvans, David C. (1987) A generalized mathematical model for wafer cooling with gas. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 385-390 doi:10.1016/0168-583x(87)90862-7
Plain TextEvans, David C. (1987) A generalized mathematical model for wafer cooling with gas. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 385-390 doi:10.1016/0168-583x(87)90862-7
In(1987, January) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 21 (1) Elsevier BV

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Benveniste, V. (1987) Wafer cooling in a high current ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 366-371 doi:10.1016/0168-583x(87)90858-5
(1987) Committees. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). doi:10.1016/0168-583x(87)90130-3
(1987) Committees. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). doi:10.1016/0168-583x(87)90802-0
(1987) Committee. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 22 (1). doi:10.1016/0168-583x(87)90283-7
(1987) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). doi:10.1016/0168-583x(87)90128-5
(1987) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 28 (1). doi:10.1016/0168-583x(87)90026-7
(1987) Calendar. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 79-81 doi:10.1016/0168-583x(87)90144-3
(1987) Subject index. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 649-653 doi:10.1016/0168-583x(87)90928-1
(1987) Author index. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 639-648 doi:10.1016/0168-583x(87)90927-x
(1987) Committees. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 29 (1). doi:10.1016/0168-583x(87)90191-1
Winterbon, K.B. (1987) Finite-angle multiple scattering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 1-7 doi:10.1016/0168-583x(87)90131-5
 
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