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Augulis, L., Jasiulionis, B., Pranevičius, L. (1987) Development of surface topology during ion sputtering of silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 608-609 doi:10.1016/0168-583x(87)90919-0

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Reference TypeJournal (article/letter/editorial)
TitleDevelopment of surface topology during ion sputtering of silicon
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsAugulis, L.Author
Jasiulionis, B.Author
Pranevičius, L.Author
Year1987 (January)Volume21
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(87)90919-0Search in ResearchGate
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Mindat Ref. ID5588268Long-form Identifiermindat:1:5:5588268:4
GUID0
Full ReferenceAugulis, L., Jasiulionis, B., Pranevičius, L. (1987) Development of surface topology during ion sputtering of silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 608-609 doi:10.1016/0168-583x(87)90919-0
Plain TextAugulis, L., Jasiulionis, B., Pranevičius, L. (1987) Development of surface topology during ion sputtering of silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 608-609 doi:10.1016/0168-583x(87)90919-0
In(1987, January) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 21 (1) Elsevier BV

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Domkus, M., Augulis, L., Pranevičius, L., Puodẑiukynas, L., Zubauskas, G. (1987) Study of mechanical strains in implanted silicon slices. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 480-482 doi:10.1016/0168-583x(87)90883-4
Galkute, L., Pranevičius, L., Zubauskas, G. (1987) Model of preferential sputtering of multicomponent materials induced by low energy ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 46-48 doi:10.1016/0168-583x(87)90137-6
(1987) Committees. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). doi:10.1016/0168-583x(87)90802-0
Biersack, J.P. (1987) Computer simulations of sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 27 (1). 21-36 doi:10.1016/0168-583x(87)90005-x
(1987) Committees. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). doi:10.1016/0168-583x(87)90130-3
King, M.L., Sampayan, S.E., Hight, B.H. (1987) A method of surface charge neutralization during ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 396-399 doi:10.1016/0168-583x(87)90864-0
(1987) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). doi:10.1016/0168-583x(87)90128-5
(1987) Subject index. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 22 (4). 608-612 doi:10.1016/0168-583x(87)90171-6
(1987) Calendar. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 79-81 doi:10.1016/0168-583x(87)90144-3
Joneliūnas, S., Pranevičius, L., Puodžiukynas, L., Ragauskas, A. (1988) Static and dynamic deformations stimulated by ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 30 (4). 528-530 doi:10.1016/0168-583x(88)90128-0
(1987) Subject index. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 649-653 doi:10.1016/0168-583x(87)90928-1
 
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