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Sampayan, Stephen E., King, Monroe L., Frisa, Larry E., Moore, Robert A., Dykstra, Jerald P. (1989) Enhanced ionization freeman ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 90-93 doi:10.1016/0168-583x(89)90141-9

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Reference TypeJournal (article/letter/editorial)
TitleEnhanced ionization freeman ion source
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsSampayan, Stephen E.Author
King, Monroe L.Author
Frisa, Larry E.Author
Moore, Robert A.Author
Dykstra, Jerald P.Author
Year1989 (February)Volume37
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(89)90141-9Search in ResearchGate
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Mindat Ref. ID5591917Long-form Identifiermindat:1:5:5591917:3
GUID0
Full ReferenceSampayan, Stephen E., King, Monroe L., Frisa, Larry E., Moore, Robert A., Dykstra, Jerald P. (1989) Enhanced ionization freeman ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 90-93 doi:10.1016/0168-583x(89)90141-9
Plain TextSampayan, Stephen E., King, Monroe L., Frisa, Larry E., Moore, Robert A., Dykstra, Jerald P. (1989) Enhanced ionization freeman ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 90-93 doi:10.1016/0168-583x(89)90141-9
In(1989) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 37. Elsevier BV

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Fleming, Jimmy L., Dykstra, Jerald P., King, Monty L., Ray, Andy M., Simonton, Robert B. (1989) NV-6208: A midcurrent ion implanter with constant beam angle of incidence. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 601-604 doi:10.1016/0168-583x(89)90256-5
Simonton, Robert, King, Monty, Kamenitsa, Dennis E. (1989) Higher charge state ion beam purity in the Eaton medium current implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 616-619 doi:10.1016/0168-583x(89)90260-7
(1989) Conference organization. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. doi:10.1016/0168-583x(89)90124-9
Ray, Andy M., Dykstra, Jerald P. (1991) Beam incidence variations in spinning disk ion implanters. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 488-492 doi:10.1016/0168-583x(91)96218-a
(1989) Committees. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. doi:10.1016/0168-583x(89)90125-0
(1989) Sponsors. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. doi:10.1016/0168-583x(89)90126-2
(1989) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. doi:10.1016/0168-583x(89)90122-5
Keller, Roderich, Nielsen, Bjarne Roger, Torp, Bo (1989) Metal beam production using a high current ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 74-77 doi:10.1016/0168-583x(89)90138-9
Dykstra, Jerald P., Ray, Andy M., Simonton, Robert B. (1991) A versatile ion implanter for planar and 3D device construction. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 478-481 doi:10.1016/0168-583x(91)96216-8
Takagi, T. (1989) Editorial. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. doi:10.1016/0168-583x(89)90123-7
Shiono, T., Shibuya, T., Harano, Y., Yabe, E., Takayama, K. (1989) Ion source with plasma cathode for ion assisted deposition. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 166-168 doi:10.1016/0168-583x(89)90160-2
 
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