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Yamamura, Yasunori, Yamada, Isao, Takagi, Toshinori (1989) Computer studies of ionized cluster beam deposition. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 902-905 doi:10.1016/0168-583x(89)90324-8

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Reference TypeJournal (article/letter/editorial)
TitleComputer studies of ionized cluster beam deposition
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsYamamura, YasunoriAuthor
Yamada, IsaoAuthor
Takagi, ToshinoriAuthor
Year1989 (February)Volume37
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(89)90324-8Search in ResearchGate
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Mindat Ref. ID5592286Long-form Identifiermindat:1:5:5592286:7
GUID0
Full ReferenceYamamura, Yasunori, Yamada, Isao, Takagi, Toshinori (1989) Computer studies of ionized cluster beam deposition. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 902-905 doi:10.1016/0168-583x(89)90324-8
Plain TextYamamura, Yasunori, Yamada, Isao, Takagi, Toshinori (1989) Computer studies of ionized cluster beam deposition. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 902-905 doi:10.1016/0168-583x(89)90324-8
In(1989) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 37. Elsevier BV

See Also

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Yamada, I., Inokawa, H., Fukushima, K., Takagi, T. (1985) Al metallization by ionized-cluster beam deposition and epitaxy. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 900-905 doi:10.1016/0168-583x(85)90491-4
Usui, Hiroaki, Tanaka, Makoto, Yamada, Isao, Takagi, Toshinori (1989) Size estimation of vaporized-metal clusters by electron microscope. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 886-890 doi:10.1016/0168-583x(89)90321-2
Takagi, Toshinori (1989) A perspective of eV-MeV ion beams. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 1-8 doi:10.1016/0168-583x(89)90127-4
Yamamura, Yasunori (1990) Computer simulation of ionized cluster beam bombardment on a carbon substrate. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 45 (1). 707-713 doi:10.1016/0168-583x(90)90929-o
Marek, Sosnowski, Isao, Yamada (1990) Ionized cluster beam deposition and thin insulating films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 46 (1). 397-404 doi:10.1016/0168-583x(90)90736-e
Takagi, T. (1989) Editorial. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. doi:10.1016/0168-583x(89)90123-7
Ina, T., Minowa, Y., Koshirakawa, N., Yamanishi, K. (1989) Development of an ionized cluster beam system for large-area deposition. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 779-782 doi:10.1016/0168-583x(89)90297-8
Yamada, I., Takagi, T. (1987) Current status of ionized-cluster beam technique: A low energy ion beam deposition. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 120-123 doi:10.1016/0168-583x(87)90809-3
Yamada, Isao (1989) ICB deposition of almost perfect large single crystal Al films on silicon substrate. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 770-774 doi:10.1016/0168-583x(89)90295-4
Tsuji, Hiroshi, Ishikawa, Junzo, Maekawa, Takeshi, Takagi, Toshinori (1989) Electron detachment cross-sections for heavy negative-ion beam. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 231-234 doi:10.1016/0168-583x(89)90175-4
Yamada, Isao (1991) Recent progress in depositing epitaxial metal films by an ionized cluster beam. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 544-549 doi:10.1016/0168-583x(91)96227-c
 
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