Vote for your favorite mineral in #MinCup25! - Cuprosklodowskite vs. Ikaite
It's radioactive #cuprosklodowskite vs ephemeral #ikaite for today's match.
Log InRegister
Quick Links : The Mindat ManualThe Rock H. Currier Digital LibraryMindat Newsletter [Free Download]
Home PageAbout MindatThe Mindat ManualHistory of MindatCopyright StatusWho We AreContact UsAdvertise on Mindat
Donate to MindatCorporate SponsorshipSponsor a PageSponsored PagesMindat AdvertisersAdvertise on Mindat
Learning CenterWhat is a mineral?The most common minerals on earthInformation for EducatorsMindat ArticlesThe ElementsThe Rock H. Currier Digital LibraryGeologic Time
Minerals by PropertiesMinerals by ChemistryAdvanced Locality SearchRandom MineralRandom LocalitySearch by minIDLocalities Near MeSearch ArticlesSearch GlossaryMore Search Options
Search For:
Mineral Name:
Locality Name:
Keyword(s):
 
The Mindat ManualAdd a New PhotoRate PhotosLocality Edit ReportCoordinate Completion ReportAdd Glossary Item
Mining CompaniesStatisticsUsersMineral MuseumsClubs & OrganizationsMineral Shows & EventsThe Mindat DirectoryDevice SettingsThe Mineral Quiz
Photo SearchPhoto GalleriesSearch by ColorNew Photos TodayNew Photos YesterdayMembers' Photo GalleriesPast Photo of the Day GalleryPhotography

Tamura, M., Suzuki, T. (1989) Damage formation and annealing of high energy ion implantation in Si. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 318-329 doi:10.1016/0168-583x(89)90795-7

Advanced
   -   Only viewable:
Reference TypeJournal (article/letter/editorial)
TitleDamage formation and annealing of high energy ion implantation in Si
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsTamura, M.Author
Suzuki, T.Author
Year1989 (March)Volume39
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(89)90795-7Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5592458Long-form Identifiermindat:1:5:5592458:2
GUID0
Full ReferenceTamura, M., Suzuki, T. (1989) Damage formation and annealing of high energy ion implantation in Si. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 318-329 doi:10.1016/0168-583x(89)90795-7
Plain TextTamura, M., Suzuki, T. (1989) Damage formation and annealing of high energy ion implantation in Si. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 318-329 doi:10.1016/0168-583x(89)90795-7
In(1989, March) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 39 (1) Elsevier BV

See Also

These are possibly similar items as determined by title/reference text matching only.

Madokoro, Y., Shukuri, S., Umemura, K., Tamura, M. (1989) Focused phosphorus ion beam implantation into silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 511-514 doi:10.1016/0168-583x(89)90837-9
Tamura, M., Ando, T., Ohyu, K. (1991) MeV-ion-induced damage in Si and its annealing. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 59. 572-583 doi:10.1016/0168-583x(91)95282-i
Keller, R. (1989) High-current ion sources for ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 40. 518-521 doi:10.1016/0168-583x(89)91036-7
Bunker, S.N., Armini, A.J. (1989) Modeling of concentration profiles from very high dose ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 7-10 doi:10.1016/0168-583x(89)90730-1
Ohyu, K., Suzuki, T., Yamanaka, T., Natsuaki, N. (1989) Feasibility of high-energy boron implantation for p-type retrograde well formation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 749-752 doi:10.1016/0168-583x(89)90291-7
Treglio, J.R. (1989) High dose metal ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 40. 567-570 doi:10.1016/0168-583x(89)91047-1
Koshida, N., Suzuki, Y., Aoyama, T. (1989) Low energy ion implantation studies of polyacetylene films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 708-711 doi:10.1016/0168-583x(89)90280-2
Bøttiger, J. (1989) Ion implantation 1988. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 36 (1). 98pp. doi:10.1016/0168-583x(89)90066-9
Yamazaki, Hajime (1989) Ion implantation for GaAs IC fabrication. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 433-440 doi:10.1016/0168-583x(89)90820-3
Ryssel, Heiner (1989) Ion implantation in semiconductors. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 42 (1). 149pp. doi:10.1016/0168-583x(89)90023-2
Namba, Susumu (1989) Focused ion beam processing. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 504-510 doi:10.1016/0168-583x(89)90836-7
 
and/or  
Mindat.org is an outreach project of the Hudson Institute of Mineralogy, a 501(c)(3) not-for-profit organization.
Copyright © mindat.org and the Hudson Institute of Mineralogy 1993-2025, except where stated. Most political location boundaries are © OpenStreetMap contributors. Mindat.org relies on the contributions of thousands of members and supporters. Founded in 2000 by Jolyon Ralph.
To cite: Ralph, J., Von Bargen, D., Martynov, P., Zhang, J., Que, X., Prabhu, A., Morrison, S. M., Li, W., Chen, W., & Ma, X. (2025). Mindat.org: The open access mineralogy database to accelerate data-intensive geoscience research. American Mineralogist, 110(6), 833–844. doi:10.2138/am-2024-9486.
Privacy Policy - Terms & Conditions - Contact Us / DMCA issues - Report a bug/vulnerability Current server date and time: September 14, 2025 16:21:16
Go to top of page