Morimoto, S., Nagata, S., Yamaguchi, S., Fujino, Y. (1990) Depth profiling of deuterium implanted in thin films by the elastic recoil detection technique of transmission geometry. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 48 (1). 478-481 doi:10.1016/0168-583x(90)90165-q
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Depth profiling of deuterium implanted in thin films by the elastic recoil detection technique of transmission geometry | ||
Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
Authors | Morimoto, S. | Author | |
Nagata, S. | Author | ||
Yamaguchi, S. | Author | ||
Fujino, Y. | Author | ||
Year | 1990 (March) | Volume | 48 |
Issue | 1 | ||
Publisher | Elsevier BV | ||
DOI | doi:10.1016/0168-583x(90)90165-qSearch in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5594893 | Long-form Identifier | mindat:1:5:5594893:5 |
GUID | 0 | ||
Full Reference | Morimoto, S., Nagata, S., Yamaguchi, S., Fujino, Y. (1990) Depth profiling of deuterium implanted in thin films by the elastic recoil detection technique of transmission geometry. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 48 (1). 478-481 doi:10.1016/0168-583x(90)90165-q | ||
Plain Text | Morimoto, S., Nagata, S., Yamaguchi, S., Fujino, Y. (1990) Depth profiling of deuterium implanted in thin films by the elastic recoil detection technique of transmission geometry. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 48 (1). 478-481 doi:10.1016/0168-583x(90)90165-q | ||
In | (1990, March) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 48 (1) Elsevier BV |
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