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Strain, Julie A., Tanaka, Yoichiro, White, Nicholas R., Woodward, Richard J. (1991) New approaches to charging control. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 97-103 doi:10.1016/0168-583x(91)96144-a

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Reference TypeJournal (article/letter/editorial)
TitleNew approaches to charging control
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsStrain, Julie A.Author
Tanaka, YoichiroAuthor
White, Nicholas R.Author
Woodward, Richard J.Author
Year1991 (April)Volume55
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(91)96144-aSearch in ResearchGate
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Mindat Ref. ID5596255Long-form Identifiermindat:1:5:5596255:5
GUID0
Full ReferenceStrain, Julie A., Tanaka, Yoichiro, White, Nicholas R., Woodward, Richard J. (1991) New approaches to charging control. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 97-103 doi:10.1016/0168-583x(91)96144-a
Plain TextStrain, Julie A., Tanaka, Yoichiro, White, Nicholas R., Woodward, Richard J. (1991) New approaches to charging control. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 97-103 doi:10.1016/0168-583x(91)96144-a
In(1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV

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Ito, Hiroyuki, White, Nicholas R. (1991) Computer modelling for ion-beam system design. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 527-532 doi:10.1016/0168-583x(91)96225-a
White, Nicholas R. (1991) Ion beam system design for ULSI device requirements. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 287-295 doi:10.1016/0168-583x(91)96179-o
Milgate, R., Pollock, J. (1991) Particle contamination control in the EXTRION 220. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 66-70 doi:10.1016/0168-583x(91)96137-a
(1991) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). doi:10.1016/0168-583x(91)96122-2
(1991) Calendar. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 53 (1). 101-103 doi:10.1016/0168-583x(91)95451-i
Stephens, K.G. (1991) Editorial. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). doi:10.1016/0168-583x(91)96123-3
(1991) Dedication. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 56. doi:10.1016/0168-583x(91)95952-a
(1991) Committees. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 59. doi:10.1016/0168-583x(91)95158-a
Hock, G., Berényi, D. (1994) Editorial. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 86 (1). doi:10.1016/0168-583x(94)96144-1
Angel, Gordon, Meyyappan, Nara, Sinclair, Frank, Tu, Weilin (1991) Charging measurement and control in high-current implanters. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 211-215 doi:10.1016/0168-583x(91)96164-g
(1991) Author index. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 905-920 doi:10.1016/0168-583x(91)96305-5
 
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