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Kolbesen, B.O., Bergholz, W., Cerva, H., Fiegl, B., Gelsdorf, F., Zoth, G. (1991) Process-induced defects in VLSI. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 124-131 doi:10.1016/0168-583x(91)96148-e

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Reference TypeJournal (article/letter/editorial)
TitleProcess-induced defects in VLSI
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsKolbesen, B.O.Author
Bergholz, W.Author
Cerva, H.Author
Fiegl, B.Author
Gelsdorf, F.Author
Zoth, G.Author
Year1991 (April)Volume55
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(91)96148-eSearch in ResearchGate
Generate Citation Formats
Mindat Ref. ID5596263Long-form Identifiermindat:1:5:5596263:4
GUID0
Full ReferenceKolbesen, B.O., Bergholz, W., Cerva, H., Fiegl, B., Gelsdorf, F., Zoth, G. (1991) Process-induced defects in VLSI. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 124-131 doi:10.1016/0168-583x(91)96148-e
Plain TextKolbesen, B.O., Bergholz, W., Cerva, H., Fiegl, B., Gelsdorf, F., Zoth, G. (1991) Process-induced defects in VLSI. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 124-131 doi:10.1016/0168-583x(91)96148-e
In(1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV

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Küsters, K.H., Mühlhoff, H.M., Cerva, H. (1991) Application of ion implantation in submicron CMOS processes. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 9-16 doi:10.1016/0168-583x(91)96126-6
(1991) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). doi:10.1016/0168-583x(91)96122-2
Stephens, K.G. (1991) Editorial. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). doi:10.1016/0168-583x(91)96123-3
(1991) Conference photo. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 54 (1). doi:10.1016/0168-583x(91)95479-w
(1991) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 53 (1). doi:10.1016/0168-583x(91)95436-h
(1991) Author index. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 905-920 doi:10.1016/0168-583x(91)96305-5
(1991) Previous confernces. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 59. doi:10.1016/0168-583x(91)95160-f
(1991) Calendar. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 61 (1). 134-137 doi:10.1016/0168-583x(91)95574-w
(1991) Editorial. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 62 (1). doi:10.1016/0168-583x(91)95920-9
(1991) Session chairmen. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 56. doi:10.1016/0168-583x(91)95953-b
(1991) Calendar. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 61 (4). 589pp. doi:10.1016/0168-583x(91)95345-e
 
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