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Montserrat, J., Bausells, J., Lora-Tamayo, E. (1991) Limitations of the spreading resistance technique for ion implant profile measurements. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 261-265 doi:10.1016/0168-583x(91)96174-j

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Reference TypeJournal (article/letter/editorial)
TitleLimitations of the spreading resistance technique for ion implant profile measurements
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsMontserrat, J.Author
Bausells, J.Author
Lora-Tamayo, E.Author
Year1991 (April)Volume55
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(91)96174-jSearch in ResearchGate
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Mindat Ref. ID5596315Long-form Identifiermindat:1:5:5596315:6
GUID0
Full ReferenceMontserrat, J., Bausells, J., Lora-Tamayo, E. (1991) Limitations of the spreading resistance technique for ion implant profile measurements. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 261-265 doi:10.1016/0168-583x(91)96174-j
Plain TextMontserrat, J., Bausells, J., Lora-Tamayo, E. (1991) Limitations of the spreading resistance technique for ion implant profile measurements. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 261-265 doi:10.1016/0168-583x(91)96174-j
In(1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV

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Bausells, J., Badenes, G., Lora-Tamayo, E. (1991) Calculation of channeling effects in ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 666-670 doi:10.1016/0168-583x(91)96254-i
Larson, L.A., Keenan, W.A., Johnson, W.H. (1991) Ion implant standard. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 275-280 doi:10.1016/0168-583x(91)96177-m
Nagai, Nobuo (1991) Implant dose uniformity simulation program. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 253-256 doi:10.1016/0168-583x(91)96172-h
Johnson, W.H., Keenan, W.A., Wetteroth, T. (1991) Gauge-capability study of ion-implant monitors. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 148-153 doi:10.1016/0168-583x(91)96152-b
(1991) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). doi:10.1016/0168-583x(91)96122-2
Young, Scott A., Head, Charles E. (1991) Radiative lifetime measurements using an argon ion beam. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 56. 265-267 doi:10.1016/0168-583x(91)96021-c
(1991) Scope of NIM-B. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 53 (1). 104pp. doi:10.1016/0168-583x(91)95452-j
Stephens, K.G. (1991) Editorial. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). doi:10.1016/0168-583x(91)96123-3
Vanhellemont, J., Roussel, Ph., Maes, H.E. (1991) Spectroscopic ellipsometry for depth profiling of ion implanted materials. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 183-187 doi:10.1016/0168-583x(91)96158-h
(1991) Author index. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 905-920 doi:10.1016/0168-583x(91)96305-5
Howard, Kenneth (1991) Implant uniformity evaluation using a Varian/Extrion scan compensator module on an electrostatic scanning ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 202-206 doi:10.1016/0168-583x(91)96162-e
 
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