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Tonegawa, Akira, Taguchi, Hirokazu, Takayama, Kazuo (1991) Double hollow cathode ion source for metal ion-beam production. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 331-334 doi:10.1016/0168-583x(91)96188-q

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Reference TypeJournal (article/letter/editorial)
TitleDouble hollow cathode ion source for metal ion-beam production
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsTonegawa, AkiraAuthor
Taguchi, HirokazuAuthor
Takayama, KazuoAuthor
Year1991 (April)Volume55
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(91)96188-qSearch in ResearchGate
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Mindat Ref. ID5596343Long-form Identifiermindat:1:5:5596343:9
GUID0
Full ReferenceTonegawa, Akira, Taguchi, Hirokazu, Takayama, Kazuo (1991) Double hollow cathode ion source for metal ion-beam production. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 331-334 doi:10.1016/0168-583x(91)96188-q
Plain TextTonegawa, Akira, Taguchi, Hirokazu, Takayama, Kazuo (1991) Double hollow cathode ion source for metal ion-beam production. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 331-334 doi:10.1016/0168-583x(91)96188-q
In(1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV

See Also

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Kogure, Shigeyuki, Tonegawa, Akira, Takayama, Kazuo, Fukui, Ryota, Takagi, Kenichi (1989) Hollow cathode ion source developed for metal ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 201-204 doi:10.1016/0168-583x(89)90169-9
Tonegawa, Akira, Yamauchi, Kazuo, Ono, Junichio, Chida, Takayuki, Takayama, Kazuo (1992) High efficiency metal ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 70 (1). 205-207 doi:10.1016/0168-583x(92)95932-h
Shibuya, Takehisa, Hashimoto, Shizuyo, Yabe, Eiji, Takayama, Kazuo (1991) Plasma cathode oxygen ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 305-309 doi:10.1016/0168-583x(91)96182-k
Ma, M., Mynard, J.E., Sealy, B.J., Stephens, K.G. (1991) A cold-hollow-cathode lateral-extraction penning ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 335-338 doi:10.1016/0168-583x(91)96189-r
Shibuya, Takehisa, Hashimoto, Shizuyo, Yabe, Eiji, Takayama, Kazuo (1991) Production of oxygen plasmas using radio-frequency magnetron-discharge. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 364-369 doi:10.1016/0168-583x(91)96195-q
Tonegawa, A., Yabe, E., Satoh, D., Sunako, K., Takayama, K., Takagi, K., Fukui, R., Okamoto, K., Komiya, S. (1985) Simple hollow cathode ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 129-132 doi:10.1016/0168-583x(85)90622-6
Ishii, Shigeyuki (1991) Improvement of an ECR multicharged ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 296-299 doi:10.1016/0168-583x(91)96180-s
Reuther, H. (1992) A magnetron source for ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 71 (1). 87-91 doi:10.1016/0168-583x(92)95344-q
Tonegawa, A., Shimoyama, T., Yabe, E., Takayama, K., Takagi, K., Fukui, R., Kikuchi, R., Okamoto, K., Komiya, S. (1987) Plasma compression type hollow cathode ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 212-214 doi:10.1016/0168-583x(87)90829-9
Holmes, A.J.T., Proudfoot, G. (1991) Negative-ion sources for ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 323-327 doi:10.1016/0168-583x(91)96186-o
White, Nicholas R. (1991) Ion beam system design for ULSI device requirements. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 287-295 doi:10.1016/0168-583x(91)96179-o
 
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