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Brown, D.A., Sferlazzo, P., O'Hanlon, J.F. (1991) Possible mechanisms for particle transport in ion implanters. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 348-354 doi:10.1016/0168-583x(91)96192-n

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Reference TypeJournal (article/letter/editorial)
TitlePossible mechanisms for particle transport in ion implanters
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsBrown, D.A.Author
Sferlazzo, P.Author
O'Hanlon, J.F.Author
Year1991 (April)Volume55
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(91)96192-nSearch in ResearchGate
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Mindat Ref. ID5596352Long-form Identifiermindat:1:5:5596352:7
GUID0
Full ReferenceBrown, D.A., Sferlazzo, P., O'Hanlon, J.F. (1991) Possible mechanisms for particle transport in ion implanters. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 348-354 doi:10.1016/0168-583x(91)96192-n
Plain TextBrown, D.A., Sferlazzo, P., O'Hanlon, J.F. (1991) Possible mechanisms for particle transport in ion implanters. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 348-354 doi:10.1016/0168-583x(91)96192-n
In(1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV

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Ray, Andy M., Dykstra, Jerald P. (1991) Beam incidence variations in spinning disk ion implanters. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 488-492 doi:10.1016/0168-583x(91)96218-a
Hucknall, D.J., Kuhn, M. (1991) Vacuum system design for ion implanters. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 439-442 doi:10.1016/0168-583x(91)96208-3
Lundquist, P., Mehta, S., Black, T., Jackson, D. (1991) Techniques for dose matching between ion implanters. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 243-249 doi:10.1016/0168-583x(91)96170-p
Fujishita, N., Noguchi, K., Sasaki, S., Yamamoto, H. (1991) A high-resolution beam profile measuring system for high-current ion implanters. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 90-93 doi:10.1016/0168-583x(91)96142-8
Tamai, T., Diamond, M., Doherty, B., Splinter, P. (1991) Mechanically scanned ion implanters with two-axis disk tilt capability. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 408-412 doi:10.1016/0168-583x(91)96202-v
Douglas-Hamilton, D.H., Taylor, C. (1985) Particles and particle transport in ion implanters. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 196-201 doi:10.1016/0168-583x(85)90633-0
Cherekdjian, S., Weisenberger, W. (1991) Energetic neutral contamination in modern high-current implanters. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 30-34 doi:10.1016/0168-583x(91)96130-d
Sinclair, Frank (1991) Gate oxides in high current implanters: how do they survive?. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 115-123 doi:10.1016/0168-583x(91)96147-d
(1991) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). doi:10.1016/0168-583x(91)96122-2
Wauk, M.T., White, N., Adibi, B., Current, M., Strain, J. (1991) Charge neutralisation in the PI9000 series implanters. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 413-416 doi:10.1016/0168-583x(91)96203-w
Stephens, K.G. (1991) Editorial. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). doi:10.1016/0168-583x(91)96123-3
 
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