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Qihua, Zhao, Xinyuan, Jiang, Chenglu, Lin, Tanguy, Pierre (1991) Beam optics research for a 600 keV heavy ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 374-378 doi:10.1016/0168-583x(91)96197-s

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Reference TypeJournal (article/letter/editorial)
TitleBeam optics research for a 600 keV heavy ion implanter
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsQihua, ZhaoAuthor
Xinyuan, JiangAuthor
Chenglu, LinAuthor
Tanguy, PierreAuthor
Year1991 (April)Volume55
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(91)96197-sSearch in ResearchGate
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Mindat Ref. ID5596362Long-form Identifiermindat:1:5:5596362:4
GUID0
Full ReferenceQihua, Zhao, Xinyuan, Jiang, Chenglu, Lin, Tanguy, Pierre (1991) Beam optics research for a 600 keV heavy ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 374-378 doi:10.1016/0168-583x(91)96197-s
Plain TextQihua, Zhao, Xinyuan, Jiang, Chenglu, Lin, Tanguy, Pierre (1991) Beam optics research for a 600 keV heavy ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 374-378 doi:10.1016/0168-583x(91)96197-s
In(1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV

See Also

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Xinyuan, Jiang, Qihua, Zhao, Anmin, Guan, Tianhao, Shao, Chenglu, Lin (1991) The application of a 600 keV heavy ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 778-781 doi:10.1016/0168-583x(91)96278-s
Jiang, Xin Yuan, Lu Shi Wan, , Shi Zhi Zu, (1987) A 600 keV research heavy ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 310-313 doi:10.1016/0168-583x(87)90847-0
Qihua, Zhao, Xinyuan, Jiang, Chenglu, Lin, Weidong, Fan, Weiyuan, Wang, Xianghuai, Liu (1989) SiFn-implanted GaAs and shallow junctions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 336-338 doi:10.1016/0168-583x(89)90198-5
Mihara, Y., Niikura, K., Tsukakoshi, O., Sakurada, Y. (1991) Parallel beam ion implanter: IPX-7000. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 417-422 doi:10.1016/0168-583x(91)96204-x
Cherekdjian, S., Weisenberger, W. (1991) Daily 2 Γ— 1012 monitoring of an ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 178-182 doi:10.1016/0168-583x(91)96157-g
Tokoro, N., O'Connor, J.P., Renau, A., Mack, M.E. (1991) The beam performance of the Genus G-1500 ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 434-438 doi:10.1016/0168-583x(91)96207-2
Walther, S.R., Outcault, R.F. (1991) Operating procedure for improving ion source lifetime for the 80-180XP ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 465-468 doi:10.1016/0168-583x(91)96213-5
(1991) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). doi:10.1016/0168-583x(91)96122-2
Pippins, Michael W. (1991) A system and performance overview of the EXTRION 220 medium-current ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 423-427 doi:10.1016/0168-583x(91)96205-y
Stephens, K.G. (1991) Editorial. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). doi:10.1016/0168-583x(91)96123-3
Dykstra, Jerald P., Ray, Andy M., Simonton, Robert B. (1991) A versatile ion implanter for planar and 3D device construction. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 478-481 doi:10.1016/0168-583x(91)96216-8
 
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