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Brown, I.G., Dickinson, M.R., Galvin, J.E., Godechot, X., MacGill, R.A. (1991) A broad-beam, high-current metal-ion implantation facility. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 506-510 doi:10.1016/0168-583x(91)96221-6

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Reference TypeJournal (article/letter/editorial)
TitleA broad-beam, high-current metal-ion implantation facility
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsBrown, I.G.Author
Dickinson, M.R.Author
Galvin, J.E.Author
Godechot, X.Author
MacGill, R.A.Author
Year1991 (April)Volume55
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(91)96221-6Search in ResearchGate
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Mindat Ref. ID5596410Long-form Identifiermindat:1:5:5596410:0
GUID0
Full ReferenceBrown, I.G., Dickinson, M.R., Galvin, J.E., Godechot, X., MacGill, R.A. (1991) A broad-beam, high-current metal-ion implantation facility. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 506-510 doi:10.1016/0168-583x(91)96221-6
Plain TextBrown, I.G., Dickinson, M.R., Galvin, J.E., Godechot, X., MacGill, R.A. (1991) A broad-beam, high-current metal-ion implantation facility. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 506-510 doi:10.1016/0168-583x(91)96221-6
In(1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV

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Qian, X.Y., Kiang, M.H., Cheung, N.W., Brown, I.G., Godechot, X., Galvin, J.E., MacGill, R.A., Yu, K.M. (1991) Metal vapor vacuum arc ion implantation for seeding of electroless Cu plating. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 893-897 doi:10.1016/0168-583x(91)96302-2
Qian, X.Y., Carl, D., Benasso, J., Cheung, N.W., Lieberman, M.A., Brown, I.G., Galvin, J.E., MacGill, R.A., Current, M.I. (1991) A plasma immersion ion implantation reactor for ULSI fabrication. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 884-887 doi:10.1016/0168-583x(91)96300-a
Brown, I.G., Galvin, J.E., MacGill, R.A., West, M.W. (1989) Multiply charged metal ion beams. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 43 (3). 455-458 doi:10.1016/0168-583x(89)90389-3
Brown, I.G., Anders, A., Anders, S., Castro, R.A., Dickinson, M.R., MacGill, R.A., Wang, Z. (1995) Synthesis of unattainable ion implantation profiles — ‘Pseudo-implantation’. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 106 (1). 646-650 doi:10.1016/0168-583x(95)00781-4
Oks, E.M., Anders, A., Brown, I.G., Dickinson, M.R., MacGill, R.A. (1997) High energy implantation with high-charge-state ions in a vacuum arc ion implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 127. 779-781 doi:10.1016/s0168-583x(97)00006-2
Brown, I.G., Galvin, J.E., Yu, K.M. (1988) High dose uranium ion implantation into silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 31 (4). 558-562 doi:10.1016/0168-583x(88)90455-7
Anders, AndrĂ©, Brown, Ian G., Dickinson, Michael R., MacGill, Robert A. (1997) High energy metal ion implantation using a novel, broad-beam, Marx-generator-based ion source “Magis”. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 127. 992-995 doi:10.1016/s0168-583x(97)00045-1
Oks, E.M., Yushkov, G.Yu., Evans, P.J., Oztarhan, A., Brown, I.G., Dickinson, M.R., Liu, F., MacGill, R.A., Monteiro, O.R., Wang, Z. (1997) Hybrid gas-metal co-implantation with a modified vacuum arc ion source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 127. 782-786 doi:10.1016/s0168-583x(97)00007-4
Tanjyo, Masayasu, Fujiwara, Shuichi, Sakamoto, Hiromichi, Naito, Masao (1991) Control of ion beam current density and profile for high current ion implantation systems. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 86-89 doi:10.1016/0168-583x(91)96141-7
Downey, Daniel F., Liebert, Reuel B. (1991) Control of BF2 dissociation in high-current ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 49-54 doi:10.1016/0168-583x(91)96134-7
Harris, M. (1991) Advances in the Extrion 1000 and XP Series high-current ion implantation systems. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 428-433 doi:10.1016/0168-583x(91)96206-z
 
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