Jianming, Li (1991) Proton-implanted new type silicon material subjected to two-step furnace annealing. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 59. 1053-1055 doi:10.1016/0168-583x(91)95763-4
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Proton-implanted new type silicon material subjected to two-step furnace annealing | ||
Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
Authors | Jianming, Li | Author | |
Year | 1991 (July) | Volume | 59 |
Publisher | Elsevier BV | ||
DOI | doi:10.1016/0168-583x(91)95763-4Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5597911 | Long-form Identifier | mindat:1:5:5597911:1 |
GUID | 0 | ||
Full Reference | Jianming, Li (1991) Proton-implanted new type silicon material subjected to two-step furnace annealing. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 59. 1053-1055 doi:10.1016/0168-583x(91)95763-4 | ||
Plain Text | Jianming, Li (1991) Proton-implanted new type silicon material subjected to two-step furnace annealing. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 59. 1053-1055 doi:10.1016/0168-583x(91)95763-4 | ||
In | (1991) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 59. Elsevier BV |
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