Kalbitzer, S. (1992) Ion beams in semiconductor physics and technology. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 63 (1). 1-13 doi:10.1016/0168-583x(92)95159-o
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Ion beams in semiconductor physics and technology | ||
Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
Authors | Kalbitzer, S. | Author | |
Year | 1992 (January) | Volume | 63 |
Issue | 1 | ||
Publisher | Elsevier BV | ||
DOI | doi:10.1016/0168-583x(92)95159-oSearch in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5598542 | Long-form Identifier | mindat:1:5:5598542:2 |
GUID | 0 | ||
Full Reference | Kalbitzer, S. (1992) Ion beams in semiconductor physics and technology. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 63 (1). 1-13 doi:10.1016/0168-583x(92)95159-o | ||
Plain Text | Kalbitzer, S. (1992) Ion beams in semiconductor physics and technology. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 63 (1). 1-13 doi:10.1016/0168-583x(92)95159-o | ||
In | (1992, January) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 63 (1) Elsevier BV |
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