Blondiaux, G., Ducouret, G., Debrun, J.L., Goujard, S., Van Den Bulcke, L. (1993) Development of a nuclear analytical technique for the analysis of ternary compounds (B + C + Si) and application to the optimization of a CVD process. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 79 (1). 521-523 doi:10.1016/0168-583x(93)95404-s
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Development of a nuclear analytical technique for the analysis of ternary compounds (B + C + Si) and application to the optimization of a CVD process | ||
Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
Authors | Blondiaux, G. | Author | |
Ducouret, G. | Author | ||
Debrun, J.L. | Author | ||
Goujard, S. | Author | ||
Van Den Bulcke, L. | Author | ||
Year | 1993 (June) | Volume | 79 |
Issue | 1 | ||
Publisher | Elsevier BV | ||
DOI | doi:10.1016/0168-583x(93)95404-sSearch in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5602192 | Long-form Identifier | mindat:1:5:5602192:5 |
GUID | 0 | ||
Full Reference | Blondiaux, G., Ducouret, G., Debrun, J.L., Goujard, S., Van Den Bulcke, L. (1993) Development of a nuclear analytical technique for the analysis of ternary compounds (B + C + Si) and application to the optimization of a CVD process. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 79 (1). 521-523 doi:10.1016/0168-583x(93)95404-s | ||
Plain Text | Blondiaux, G., Ducouret, G., Debrun, J.L., Goujard, S., Van Den Bulcke, L. (1993) Development of a nuclear analytical technique for the analysis of ternary compounds (B + C + Si) and application to the optimization of a CVD process. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 79 (1). 521-523 doi:10.1016/0168-583x(93)95404-s | ||
In | (1993, June) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 79 (1) Elsevier BV |
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