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Nakao, Setsuo (2009) Structural changes of Si surfaces by nitrogen implantation using plasma based ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 267 (8). 1303-1306 doi:10.1016/j.nimb.2009.01.117

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Reference TypeJournal (article/letter/editorial)
TitleStructural changes of Si surfaces by nitrogen implantation using plasma based ion implantation
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsNakao, SetsuoAuthor
Year2009 (May)Volume267
Issue8
PublisherElsevier BV
DOIdoi:10.1016/j.nimb.2009.01.117Search in ResearchGate
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Mindat Ref. ID5642259Long-form Identifiermindat:1:5:5642259:5
GUID0
Full ReferenceNakao, Setsuo (2009) Structural changes of Si surfaces by nitrogen implantation using plasma based ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 267 (8). 1303-1306 doi:10.1016/j.nimb.2009.01.117
Plain TextNakao, Setsuo (2009) Structural changes of Si surfaces by nitrogen implantation using plasma based ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 267 (8). 1303-1306 doi:10.1016/j.nimb.2009.01.117
In(2009, May) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 267 (8) Elsevier BV

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Nakao, Setsuo, Kinomura, Atsushi, Sonoda, Tsutomu (2013) Nitrogen implantation into diamond-like carbon films prepared by bipolar-type plasma based ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 307. 333-339 doi:10.1016/j.nimb.2012.12.088
Nakao, Setsuo (2009) Effects of working pressure on the deposition of diamond-like carbon films prepared by bipolar-type plasma based ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 267 (8). 1684-1687 doi:10.1016/j.nimb.2009.01.103
Kimura, Takashi, Yanai, Hidekazu, Nakao, Setsuo, Azuma, Kingo (2018) Plasma based nitrogen ion implantation to hydrogenated diamond-like carbon films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 433. 87-92 doi:10.1016/j.nimb.2018.08.009
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Nakao, Setsuo, Matsumoto, Akihiro, Soga, Tetsuo, Kishi, Naoki (2013) Effects of H2 gas addition into process and H ion implantation on the microstructure of hydrogenated amorphous carbon films prepared by bipolar-type plasma based ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 307. 328-332 doi:10.1016/j.nimb.2012.11.082
Han, Z.J., Tay, B.K. (2009) Ti–PS nanocomposites by plasma immersion ion implantation and deposition. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 267 (3). 496-501 doi:10.1016/j.nimb.2008.12.013
Flege, S., Kraft, G., Baba, K., Hatada, R., Ensinger, W. (2009) Distribution of carbon in polycrystalline copper surfaces treated by methane plasma immersion ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 267 (8). 1531-1535 doi:10.1016/j.nimb.2009.01.126
Suvorova, Alexandra A., Nunney, Tim, Suvorov, Alexander V. (2009) Fabrication of Si–C–N compounds in silicon carbide by ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 267 (8). 1294-1298 doi:10.1016/j.nimb.2009.01.036
Bregolin, F.L., Behar, M., Sias, U.S., Moreira, E.C. (2009) Photoluminescence induced by Si implantation into Si3N4 matrix. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 267 (8). 1314-1316 doi:10.1016/j.nimb.2009.01.038
dos Reis, R.M.S., Maltez, R.L., Boudinov, H. (2009) Ion beam synthesis of SiC by C implantation into SIMOX(111). Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 267 (8). 1281-1284 doi:10.1016/j.nimb.2009.01.164
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