Whitlow, H.J., Gorelick, S., Puttaraksa, N., Napari, M., Hokkanen, M.J., Norarat, R. (2013) Development of procedures for programmable proximity aperture lithography. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 306. 307-310 doi:10.1016/j.nimb.2012.11.046
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Development of procedures for programmable proximity aperture lithography | ||
Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
Authors | Whitlow, H.J. | Author | |
Gorelick, S. | Author | ||
Puttaraksa, N. | Author | ||
Napari, M. | Author | ||
Hokkanen, M.J. | Author | ||
Norarat, R. | Author | ||
Year | 2013 (July) | Volume | 306 |
Publisher | Elsevier BV | ||
DOI | doi:10.1016/j.nimb.2012.11.046Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5647556 | Long-form Identifier | mindat:1:5:5647556:0 |
GUID | 0 | ||
Full Reference | Whitlow, H.J., Gorelick, S., Puttaraksa, N., Napari, M., Hokkanen, M.J., Norarat, R. (2013) Development of procedures for programmable proximity aperture lithography. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 306. 307-310 doi:10.1016/j.nimb.2012.11.046 | ||
Plain Text | Whitlow, H.J., Gorelick, S., Puttaraksa, N., Napari, M., Hokkanen, M.J., Norarat, R. (2013) Development of procedures for programmable proximity aperture lithography. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 306. 307-310 doi:10.1016/j.nimb.2012.11.046 | ||
In | (2013) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 306. Elsevier BV |
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