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Vanga, S.K., Bettiol, A.A. (2013) Proton beam writing of three-dimensional microcavities. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 306. 281-283 doi:10.1016/j.nimb.2012.12.058

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Reference TypeJournal (article/letter/editorial)
TitleProton beam writing of three-dimensional microcavities
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsVanga, S.K.Author
Bettiol, A.A.Author
Year2013 (July)Volume306
PublisherElsevier BV
DOIdoi:10.1016/j.nimb.2012.12.058Search in ResearchGate
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Mindat Ref. ID5647632Long-form Identifiermindat:1:5:5647632:9
GUID0
Full ReferenceVanga, S.K., Bettiol, A.A. (2013) Proton beam writing of three-dimensional microcavities. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 306. 281-283 doi:10.1016/j.nimb.2012.12.058
Plain TextVanga, S.K., Bettiol, A.A. (2013) Proton beam writing of three-dimensional microcavities. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 306. 281-283 doi:10.1016/j.nimb.2012.12.058
In(2013) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 306. Elsevier BV

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Ow, Y.S., Breese, M.B.H., Bettiol, A.A. (2009) Proton beam writing for producing holographic images. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 267 (12). 2289-2291 doi:10.1016/j.nimb.2009.03.047
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van Kan, J.A., Zhang, F., Zhang, C., Bettiol, A.A., Watt, F. (2008) Exposure parameters in proton beam writing for hydrogen silsesquioxane. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 266 (8). 1676-1679 doi:10.1016/j.nimb.2007.12.081
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