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Vargas, André Luís Marin, de Araújo Ribeiro, Fabiana, Hübler, Roberto (2015) Changes in the Young Modulus of hafnium oxide thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 365. 362-366 doi:10.1016/j.nimb.2015.07.096

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Reference TypeJournal (article/letter/editorial)
TitleChanges in the Young Modulus of hafnium oxide thin films
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsVargas, André Luís MarinAuthor
de Araújo Ribeiro, FabianaAuthor
Hübler, RobertoAuthor
Year2015 (December)Volume365
PublisherElsevier BV
DOIdoi:10.1016/j.nimb.2015.07.096Search in ResearchGate
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Mindat Ref. ID5652330Long-form Identifiermindat:1:5:5652330:8
GUID0
Full ReferenceVargas, André Luís Marin, de Araújo Ribeiro, Fabiana, Hübler, Roberto (2015) Changes in the Young Modulus of hafnium oxide thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 365. 362-366 doi:10.1016/j.nimb.2015.07.096
Plain TextVargas, André Luís Marin, de Araújo Ribeiro, Fabiana, Hübler, Roberto (2015) Changes in the Young Modulus of hafnium oxide thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 365. 362-366 doi:10.1016/j.nimb.2015.07.096
In(2015) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 365. Elsevier BV

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