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Jiang, C., Nicolaï, J., Declémy, A., Gilabert, E., Beaufort, M.-F., Barbot, J.-F. (2016) Implantation damage in heavy gas implanted 4H-SiC. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 374. 71-75 doi:10.1016/j.nimb.2016.01.002

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Reference TypeJournal (article/letter/editorial)
TitleImplantation damage in heavy gas implanted 4H-SiC
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsJiang, C.Author
Nicolaï, J.Author
Declémy, A.Author
Gilabert, E.Author
Beaufort, M.-F.Author
Barbot, J.-F.Author
Year2016 (May)Volume374
PublisherElsevier BV
DOIdoi:10.1016/j.nimb.2016.01.002Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5653003Long-form Identifiermindat:1:5:5653003:4
GUID0
Full ReferenceJiang, C., Nicolaï, J., Declémy, A., Gilabert, E., Beaufort, M.-F., Barbot, J.-F. (2016) Implantation damage in heavy gas implanted 4H-SiC. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 374. 71-75 doi:10.1016/j.nimb.2016.01.002
Plain TextJiang, C., Nicolaï, J., Declémy, A., Gilabert, E., Beaufort, M.-F., Barbot, J.-F. (2016) Implantation damage in heavy gas implanted 4H-SiC. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 374. 71-75 doi:10.1016/j.nimb.2016.01.002
In(2016) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 374. Elsevier BV

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Barbot, J.-F., Beaufort, M.-F., Declémy, A. (2014) Strain build-up in SiC implanted at different temperatures. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 327. 59-62 doi:10.1016/j.nimb.2013.09.053
Leclerc, S., Beaufort, M.F., Declémy, A., Barbot, J.F. (2006) Damage induced in high energy helium-implanted 4H-SiC. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 242 (1). 399-401 doi:10.1016/j.nimb.2005.08.165
Oliviero, E., Beaufort, M.F., Pailloux, F., Barbot, J.F. (2004) Damage formation in high energy helium implanted 4H-SiC. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 218. 391-395 doi:10.1016/j.nimb.2004.02.005
Rousselet, S., Declémy, A., Beaufort, M.-F., David, M.-L., Barbot, J.-F. (2012) About extended defect formation in helium-implanted germanium. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 272. 309-312 doi:10.1016/j.nimb.2011.01.089
Tromas, C., Audurier, V., Leclerc, S., Beaufort, M.F., Declémy, A., Barbot, J.F. (2008) Structure and mechanical properties of He-implanted SiC. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 266 (12). 2776-2779 doi:10.1016/j.nimb.2008.03.115
Beaufort, M.F, Oliviero, E, David, M.L, Nomgaudyte, J, Pranevicius, L, Declémy, A, Barbot, J.F (2002) Defects induced by high energy helium implantation in 4H–SiC. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 186 (1). 218-222 doi:10.1016/s0168-583x(01)00912-0
Declémy, A., Oliviero, E., Beaufort, M.F., Barbot, J.F., David, M.L., Blanchard, C., Tessier, Y., Ntsoenzok, E. (2002) An IR-reflectivity and X-ray diffraction study of high energy He-ion implantation-induced damage in 4H–SiC. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 186 (1). 318-323 doi:10.1016/s0168-583x(01)00921-1
Ali, A. Ashraf, Kumar, J., Ramakrishnan, V., Asokan, K. (2016) Transition metal swift heavy ion implantation on 4H-SiC. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 370. 101-106 doi:10.1016/j.nimb.2016.01.019
Jiang, C, Declémy, A, Beaufort, M-F, Boulle, A, Barbot, J-F (2019) Effect of temperature on Xe implantation-induced damage in 4H-SiC. Journal of Physics: Conference Series, 1190. 12015pp. doi:10.1088/1742-6596/1190/1/012015
David, M.L, Ratchenkova, A, Oliviero, E, Denanot, M.F, Beaufort, M.F, Declémy, A, Blanchard, C, Gerasimenko, N.N, Barbot, J.F (2002) Radiation damage in He implanted silicon at high temperature using multi-energies. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 198 (1). 83-89 doi:10.1016/s0168-583x(02)01517-3
David, M.L., Beaufort, M.F., Barbot, J.F. (2004) Stability of defects created by high fluence helium implantation in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 226 (4). 531-536 doi:10.1016/j.nimb.2004.07.009
 
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