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Gupta, Harsh, Bommali, Ravi. K., Ghosh, S, Srivastava, P (2017) Stabilization of Si rich nitride phase by swift heavy ion irradiation in non-stoichiometric a-SiNx:H thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 410. 164-170 doi:10.1016/j.nimb.2017.08.027

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Reference TypeJournal (article/letter/editorial)
TitleStabilization of Si rich nitride phase by swift heavy ion irradiation in non-stoichiometric a-SiNx:H thin films
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsGupta, HarshAuthor
Bommali, Ravi. K.Author
Ghosh, SAuthor
Srivastava, PAuthor
Year2017 (November)Volume410
PublisherElsevier BV
DOIdoi:10.1016/j.nimb.2017.08.027Search in ResearchGate
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Mindat Ref. ID5655251Long-form Identifiermindat:1:5:5655251:3
GUID0
Full ReferenceGupta, Harsh, Bommali, Ravi. K., Ghosh, S, Srivastava, P (2017) Stabilization of Si rich nitride phase by swift heavy ion irradiation in non-stoichiometric a-SiNx:H thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 410. 164-170 doi:10.1016/j.nimb.2017.08.027
Plain TextGupta, Harsh, Bommali, Ravi. K., Ghosh, S, Srivastava, P (2017) Stabilization of Si rich nitride phase by swift heavy ion irradiation in non-stoichiometric a-SiNx:H thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 410. 164-170 doi:10.1016/j.nimb.2017.08.027
In(2017) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 410. Elsevier BV

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