Ieshkin, A.E., Kireev, D.S., Ermakov, Yu.A., Trifonov, A.S., Presnov, D.E., Garshev, A.V., Anufriev, Yu.V., Prokhorova, I.G., Krupenin, V.A., Chernysh, V.S. (2018) The quantitative analysis of silicon carbide surface smoothing by Ar and Xe cluster ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 421. 27-31 doi:10.1016/j.nimb.2018.02.019
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | The quantitative analysis of silicon carbide surface smoothing by Ar and Xe cluster ions | ||
| Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
| Authors | Ieshkin, A.E. | Author | |
| Kireev, D.S. | Author | ||
| Ermakov, Yu.A. | Author | ||
| Trifonov, A.S. | Author | ||
| Presnov, D.E. | Author | ||
| Garshev, A.V. | Author | ||
| Anufriev, Yu.V. | Author | ||
| Prokhorova, I.G. | Author | ||
| Krupenin, V.A. | Author | ||
| Chernysh, V.S. | Author | ||
| Year | 2018 (April) | Volume | 421 |
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/j.nimb.2018.02.019Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5655700 | Long-form Identifier | mindat:1:5:5655700:4 |
| GUID | 0 | ||
| Full Reference | Ieshkin, A.E., Kireev, D.S., Ermakov, Yu.A., Trifonov, A.S., Presnov, D.E., Garshev, A.V., Anufriev, Yu.V., Prokhorova, I.G., Krupenin, V.A., Chernysh, V.S. (2018) The quantitative analysis of silicon carbide surface smoothing by Ar and Xe cluster ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 421. 27-31 doi:10.1016/j.nimb.2018.02.019 | ||
| Plain Text | Ieshkin, A.E., Kireev, D.S., Ermakov, Yu.A., Trifonov, A.S., Presnov, D.E., Garshev, A.V., Anufriev, Yu.V., Prokhorova, I.G., Krupenin, V.A., Chernysh, V.S. (2018) The quantitative analysis of silicon carbide surface smoothing by Ar and Xe cluster ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 421. 27-31 doi:10.1016/j.nimb.2018.02.019 | ||
| In | (2018) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 421. Elsevier BV | ||
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