Matsunami, N., Okayasu, S., Sataka, M., Tsuchiya, B. (2018) Ion irradiation effects on WNxOy thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 435. 146-151 doi:10.1016/j.nimb.2018.05.044
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Ion irradiation effects on WNxOy thin films | ||
Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
Authors | Matsunami, N. | Author | |
Okayasu, S. | Author | ||
Sataka, M. | Author | ||
Tsuchiya, B. | Author | ||
Year | 2018 (November) | Volume | 435 |
Publisher | Elsevier BV | ||
DOI | doi:10.1016/j.nimb.2018.05.044Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5656275 | Long-form Identifier | mindat:1:5:5656275:0 |
GUID | 0 | ||
Full Reference | Matsunami, N., Okayasu, S., Sataka, M., Tsuchiya, B. (2018) Ion irradiation effects on WNxOy thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 435. 146-151 doi:10.1016/j.nimb.2018.05.044 | ||
Plain Text | Matsunami, N., Okayasu, S., Sataka, M., Tsuchiya, B. (2018) Ion irradiation effects on WNxOy thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 435. 146-151 doi:10.1016/j.nimb.2018.05.044 | ||
In | (2018) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 435. Elsevier BV |
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