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Guo, X M, Ohl, A (1998) Spatially resolved ion energy distribution measurements in a large-area planar microwave plasma. Journal of Physics D: Applied Physics, 31. 2018-2024 doi:10.1088/0022-3727/31/16/012

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Reference TypeJournal (article/letter/editorial)
TitleSpatially resolved ion energy distribution measurements in a large-area planar microwave plasma
JournalJournal of Physics D: Applied Physics
AuthorsGuo, X MAuthor
Ohl, AAuthor
Year1998 (August 21)Volume31
PublisherIOP Publishing
DOIdoi:10.1088/0022-3727/31/16/012Search in ResearchGate
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Mindat Ref. ID5667029Long-form Identifiermindat:1:5:5667029:9
GUID0
Full ReferenceGuo, X M, Ohl, A (1998) Spatially resolved ion energy distribution measurements in a large-area planar microwave plasma. Journal of Physics D: Applied Physics, 31. 2018-2024 doi:10.1088/0022-3727/31/16/012
Plain TextGuo, X M, Ohl, A (1998) Spatially resolved ion energy distribution measurements in a large-area planar microwave plasma. Journal of Physics D: Applied Physics, 31. 2018-2024 doi:10.1088/0022-3727/31/16/012
In(1998) Journal of Physics D: Applied Physics Vol. 31. IOP Publishing

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