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Nanbu, K, Mitsui, K, Kondo, S (2000) Self-consistent particle modelling of dc magnetron discharges of an O2/Ar mixture. Journal of Physics D: Applied Physics, 33. 2274-2283 doi:10.1088/0022-3727/33/18/311

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Reference TypeJournal (article/letter/editorial)
TitleSelf-consistent particle modelling of dc magnetron discharges of an O2/Ar mixture
JournalJournal of Physics D: Applied Physics
AuthorsNanbu, KAuthor
Mitsui, KAuthor
Kondo, SAuthor
Year2000 (September 21)Volume33
PublisherIOP Publishing
DOIdoi:10.1088/0022-3727/33/18/311Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5668093Long-form Identifiermindat:1:5:5668093:1
GUID0
Full ReferenceNanbu, K, Mitsui, K, Kondo, S (2000) Self-consistent particle modelling of dc magnetron discharges of an O2/Ar mixture. Journal of Physics D: Applied Physics, 33. 2274-2283 doi:10.1088/0022-3727/33/18/311
Plain TextNanbu, K, Mitsui, K, Kondo, S (2000) Self-consistent particle modelling of dc magnetron discharges of an O2/Ar mixture. Journal of Physics D: Applied Physics, 33. 2274-2283 doi:10.1088/0022-3727/33/18/311
In(2000) Journal of Physics D: Applied Physics Vol. 33. IOP Publishing

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Kondo, S, Nanbu, K (1999) A self-consistent numerical analysis of a planar dc magnetron discharge by the particle-in-cell/Monte Carlo method. Journal of Physics D: Applied Physics, 32. 1142-1152 doi:10.1088/0022-3727/32/10/311
Hertl, Michael, Jolly, Jacques (2000) Laser-induced fluorescence detection and kinetics of SiH2radicals in Ar/H2/SiH4RF discharges. Journal of Physics D: Applied Physics, 33. 381-388 doi:10.1088/0022-3727/33/4/311
Pellerin, S, Richard, F, Chapelle, J, Cormier, J-M, Musiol, K (2000) Heat string model of bi-dimensional dc Glidarc. Journal of Physics D: Applied Physics, 33. 2407-2419 doi:10.1088/0022-3727/33/19/311
Kawano, Satoyuki, Nanbu, Kenichi, Kageyama, Junichi (2000) Systematic simulations of plasma structures in chlorine radio frequency discharges. Journal of Physics D: Applied Physics, 33. 2637-2646 doi:10.1088/0022-3727/33/20/316
Uhrlandt, D, Schmidt, M, Behnke, J F, Bindemann, T (2000) Self-consistent description of the dc column plasma including wall interaction. Journal of Physics D: Applied Physics, 33. 2475-2482 doi:10.1088/0022-3727/33/19/318
Bhoga, S S, Singh, K (2000) An investigation on rare-earth cation substituted beta-Me2SO4(Me = Ag, Li and Na). Journal of Physics D: Applied Physics, 33. 80-87 doi:10.1088/0022-3727/33/1/311
Filimonova, E A, Amirov, R H, Kim, H T, Park, I H (2000) Comparative modelling of NOxand SO2removal from pollutant gases using pulsed-corona and silent discharges. Journal of Physics D: Applied Physics, 33. 1716-1727 doi:10.1088/0022-3727/33/14/311
Bánó, G, Horváth, P, Rózsa, K (2000) Cathaphoretic confinement of Zn evaporated into helium and neon discharges. Journal of Physics D: Applied Physics, 33. 2611-2617 doi:10.1088/0022-3727/33/20/314
Jani, Muaffaq A, Toda, K, Takaki, K, Fujiwara, T (2000) An experimental comparison between electrode shapes for NOxtreatment using a dielectric barrier discharge. Journal of Physics D: Applied Physics, 33. 3078-3082 doi:10.1088/0022-3727/33/23/311
Carman, R J, Mildren, R P (2000) Electron energy distribution functions for modelling the plasma kinetics in dielectric barrier discharges. Journal of Physics D: Applied Physics, 33. doi:10.1088/0022-3727/33/19/101
Lam, S K, Zheng, C-E, Lo, D, Dem'yanov, A, Napartovich, A P (2000) Kinetics of Ar*2in high-pressure pure argon. Journal of Physics D: Applied Physics, 33. 242-251 doi:10.1088/0022-3727/33/3/310
 
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