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Ganetsos, Th, Aidinis, C, Bischoff, L, Mair, G L R, Teichert, J, Panknin, D, Papadopoulos, I (2001) Liquid metal ion source-produced germanium ions for maskless ion implantation. Journal of Physics D: Applied Physics, 34. doi:10.1088/0022-3727/34/3/102

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Reference TypeJournal (article/letter/editorial)
TitleLiquid metal ion source-produced germanium ions for maskless ion implantation
JournalJournal of Physics D: Applied Physics
AuthorsGanetsos, ThAuthor
Aidinis, CAuthor
Bischoff, LAuthor
Mair, G L RAuthor
Teichert, JAuthor
Panknin, DAuthor
Papadopoulos, IAuthor
Year2001 (February 7)Volume34
PublisherIOP Publishing
DOIdoi:10.1088/0022-3727/34/3/102Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5668813Long-form Identifiermindat:1:5:5668813:7
GUID0
Full ReferenceGanetsos, Th, Aidinis, C, Bischoff, L, Mair, G L R, Teichert, J, Panknin, D, Papadopoulos, I (2001) Liquid metal ion source-produced germanium ions for maskless ion implantation. Journal of Physics D: Applied Physics, 34. doi:10.1088/0022-3727/34/3/102
Plain TextGanetsos, Th, Aidinis, C, Bischoff, L, Mair, G L R, Teichert, J, Panknin, D, Papadopoulos, I (2001) Liquid metal ion source-produced germanium ions for maskless ion implantation. Journal of Physics D: Applied Physics, 34. doi:10.1088/0022-3727/34/3/102
In(2000) Journal of Physics D: Applied Physics Vol. 34. IOP Publishing

See Also

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Ganetsos, Th, Aidinis, C, Bischoff, L, Mair, G L R, Teichert, J (2001) Liquid metal ion source-produced germanium ions for maskless ion implantation. Journal of Physics D: Applied Physics, 34. 839 doi:10.1088/0022-3727/34/5/502
Aidinis, C J, Mair, G L R, Bischoff, L, Papadopoulos, I (2001) A study of the temperature dependence of the energy spread and energy deficit of a Ge+ +ion beam produced by a liquid metal alloy ion source. Journal of Physics D: Applied Physics, 34. doi:10.1088/0022-3727/34/3/103
Aidinis, C J, Mair, G L R, Bischoff, L, Papadopoulos, I (2001) A study of the temperature dependence of the energy spread and energy deficit of a Ge++ ion beam produced by a liquid metal alloy ion source. Journal of Physics D: Applied Physics, 34. 838 doi:10.1088/0022-3727/34/5/501
Mair, G L R, Aidinis, C J, Bischoff, L, Ganetsos, Th (2002) On the dynamics of liquid metal ion sources. Journal of Physics D: Applied Physics, 35. 2236 doi:10.1088/0022-3727/35/17/501
Mair, G L R, Aidinis, C J, Bischoff, L, Ganetsos, Th (2002) On the dynamics of liquid metal ion sources. Journal of Physics D: Applied Physics, 35. 2236 doi:10.1088/0022-3727/35/19/501
Mair, G L R, Ganetsos, Th, Bischoff, L, Teichert, J (2000) Doubly-charged ions from liquid metal alloy ion sources: direct field-evaporation or post-ionization?. Journal of Physics D: Applied Physics, 33. doi:10.1088/0022-3727/33/17/102
Mair, G L R, Aidinis, C J, Bischoff, L, Ganetsos, Th (2002) On the dynamics of liquid metal ion sources. Journal of Physics D: Applied Physics, 35. 1392-1396 doi:10.1088/0022-3727/35/12/315
Mair, G L R, Bischoff, L, Mair, A W R, Aidinis, C J, Ganetsos, Th, Aleiev, C A (2002) An in-depth investigation of the energy distribution of doubly charged ions emitted from a liquid metal alloy ion source. Journal of Physics D: Applied Physics, 35. doi:10.1088/0022-3727/35/9/101
Ganetsos, Th., Tsamakis, D., Panknin, D., Mair, G. L.R., Teichert, J., Bischoff, L., Aidinis, C. (1998) Si1-x Gex structures fabricated by focused ion beam implantation. Le Journal de Physique IV, 8. doi:10.1051/jp4:1998325
Bischoff, L, Teichert, J, Ganetsos, Th, Mair, G L R (2000) Temperature dependence of the electric characteristics of liquid metal alloy ion sources. Journal of Physics D: Applied Physics, 33. 692-695 doi:10.1088/0022-3727/33/6/316
Akhmadaliev, Ch, Bischoff, L, Mair, G L R, Aidinis, C J, Ganetsos, Th, Anagnostakis, E (2003) Temperature dependence of emission frequency spectra of a liquid metal anode. Journal of Physics D: Applied Physics, 36. doi:10.1088/0022-3727/36/1/105
 
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