Cheng, Liang, Xu, Weizong, Pan, Danfeng, Zhu, Youhua, Ren, Fangfang, Zhou, Dong, Ye, Jiandong, Chen, Dunjun, Zhang, Rong, Zheng, Youdou, Lu, Hai (2019) Gate-first process compatible, high-quality in situ SiN x for surface passivation and gate dielectrics in AlGaN/GaN MISHEMTs. Journal of Physics D: Applied Physics, 52. 305105pp. doi:10.1088/1361-6463/ab1dc3
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Gate-first process compatible, high-quality in situ SiN x for surface passivation and gate dielectrics in AlGaN/GaN MISHEMTs | ||
Journal | Journal of Physics D: Applied Physics | ||
Authors | Cheng, Liang | Author | |
Xu, Weizong | Author | ||
Pan, Danfeng | Author | ||
Zhu, Youhua | Author | ||
Ren, Fangfang | Author | ||
Zhou, Dong | Author | ||
Ye, Jiandong | Author | ||
Chen, Dunjun | Author | ||
Zhang, Rong | Author | ||
Zheng, Youdou | Author | ||
Lu, Hai | Author | ||
Year | 2019 (July 24) | Volume | 52 |
Publisher | IOP Publishing | ||
DOI | doi:10.1088/1361-6463/ab1dc3Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5694230 | Long-form Identifier | mindat:1:5:5694230:9 |
GUID | 0 | ||
Full Reference | Cheng, Liang, Xu, Weizong, Pan, Danfeng, Zhu, Youhua, Ren, Fangfang, Zhou, Dong, Ye, Jiandong, Chen, Dunjun, Zhang, Rong, Zheng, Youdou, Lu, Hai (2019) Gate-first process compatible, high-quality in situ SiN x for surface passivation and gate dielectrics in AlGaN/GaN MISHEMTs. Journal of Physics D: Applied Physics, 52. 305105pp. doi:10.1088/1361-6463/ab1dc3 | ||
Plain Text | Cheng, Liang, Xu, Weizong, Pan, Danfeng, Zhu, Youhua, Ren, Fangfang, Zhou, Dong, Ye, Jiandong, Chen, Dunjun, Zhang, Rong, Zheng, Youdou, Lu, Hai (2019) Gate-first process compatible, high-quality in situ SiN x for surface passivation and gate dielectrics in AlGaN/GaN MISHEMTs. Journal of Physics D: Applied Physics, 52. 305105pp. doi:10.1088/1361-6463/ab1dc3 | ||
In | (2019) Journal of Physics D: Applied Physics Vol. 52. IOP Publishing |
See Also
These are possibly similar items as determined by title/reference text matching only.