Reference Type | Journal (article/letter/editorial) |
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Title | Residual damage in B+ and –implanted Si |
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Journal | Canadian Journal of Physics |
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Authors | Vandervorst, W. | Author |
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Houghton, D. C. | Author |
Shepherd, F. R. | Author |
Swanson, M. L. | Author |
Plattner, H. H. | Author |
Carpenter, G. J. C. | Author |
Year | 1985 (June 1) | Volume | 63 |
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Publisher | Canadian Science Publishing |
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DOI | doi:10.1139/p85-140Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 5992013 | Long-form Identifier | mindat:1:5:5992013:1 |
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|
GUID | 0 |
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Full Reference | Vandervorst, W., Houghton, D. C., Shepherd, F. R., Swanson, M. L., Plattner, H. H., Carpenter, G. J. C. (1985) Residual damage in B+ and –implanted Si. Canadian Journal of Physics, 63. 863-869 doi:10.1139/p85-140 |
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Plain Text | Vandervorst, W., Houghton, D. C., Shepherd, F. R., Swanson, M. L., Plattner, H. H., Carpenter, G. J. C. (1985) Residual damage in B+ and –implanted Si. Canadian Journal of Physics, 63. 863-869 doi:10.1139/p85-140 |
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In | (n.d.) Canadian Journal of Physics Vol. 63. Canadian Science Publishing |
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