Lin, Re-Ching, Chen, Ying-Chung, Kao, Kuo-Sheng (2007) Two-step sputtered ZnO piezoelectric films for film bulk acoustic resonators. Applied Physics A, 89. 475-479 doi:10.1007/s00339-007-4157-8
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Two-step sputtered ZnO piezoelectric films for film bulk acoustic resonators | ||
| Journal | Applied Physics A | ||
| Authors | Lin, Re-Ching | Author | |
| Chen, Ying-Chung | Author | ||
| Kao, Kuo-Sheng | Author | ||
| Year | 2007 (August 25) | Volume | 89 |
| Publisher | Springer Science and Business Media LLC | ||
| DOI | doi:10.1007/s00339-007-4157-8Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 6013025 | Long-form Identifier | mindat:1:5:6013025:7 |
| GUID | 0 | ||
| Full Reference | Lin, Re-Ching, Chen, Ying-Chung, Kao, Kuo-Sheng (2007) Two-step sputtered ZnO piezoelectric films for film bulk acoustic resonators. Applied Physics A, 89. 475-479 doi:10.1007/s00339-007-4157-8 | ||
| Plain Text | Lin, Re-Ching, Chen, Ying-Chung, Kao, Kuo-Sheng (2007) Two-step sputtered ZnO piezoelectric films for film bulk acoustic resonators. Applied Physics A, 89. 475-479 doi:10.1007/s00339-007-4157-8 | ||
| In | (2007) Applied Physics A Vol. 89. Springer Science and Business Media LLC | ||
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