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Wilkinson, C. D. W., Rahman, M. (2004) Dry etching and sputtering. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 362 (1814) 125-138 doi:10.1098/rsta.2003.1307

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Reference TypeJournal (article/letter/editorial)
TitleDry etching and sputtering
JournalPhilosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences
AuthorsWilkinson, C. D. W.Author
Rahman, M.Author
Year2004 (January 15)Volume362
Issue1814
PublisherThe Royal Society
DOIdoi:10.1098/rsta.2003.1307Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID660565Long-form Identifiermindat:1:5:660565:4
GUID0
Full ReferenceWilkinson, C. D. W., Rahman, M. (2004) Dry etching and sputtering. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 362 (1814) 125-138 doi:10.1098/rsta.2003.1307
Plain TextWilkinson, C. D. W., Rahman, M. (2004) Dry etching and sputtering. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 362 (1814) 125-138 doi:10.1098/rsta.2003.1307
In(2004, January) Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences Vol. 362 (1814) The Royal Society

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Jakas, Mario M. (2004) Transport theories of sputtering. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 362 (1814) 139-156 doi:10.1098/rsta.2003.1305
Aumayr, Friedrich, Winter, Hannspeter (2004) Potential sputtering. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 362 (1814) 77-102 doi:10.1098/rsta.2003.1300
Thompson, M. W. (2004) The contribution of collision cascades to sputtering and radiation damage. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 362 (1814) 5-28 doi:10.1098/rsta.2003.1309
Baragiola, Raúl A. (2004) Sputtering: survey of observations and derived principles. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 362 (1814) 29-53 doi:10.1098/rsta.2003.1301
Smith, Roger, Kenny, Steven D., Ramasawmy, Deerajen (2004) Molecular-dynamics simulations of sputtering. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 362 (1814) 157-176 doi:10.1098/rsta.2003.1308
Thomas, John Meurig (2004) Introduction. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 362 (1814) 3-4 doi:10.1098/rsta.2003.1310
Colligon, John S. (2004) Ion–assisted sputter deposition. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 362 (1814) 103-116 doi:10.1098/rsta.2003.1303
Xirouchaki, C., Palmer, R. E. (2004) Deposition of size-selected metal clusters generated by magnetron sputtering and gas condensation: a progress review. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 362 (1814) 117-124 doi:10.1098/rsta.2003.1306
Hofmann, S. (2004) Sputter-depth profiling for thin-film analysis. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 362 (1814) 55-75 doi:10.1098/rsta.2003.1304
Betz, G., Husinsky, W. (2004) Modelling of cluster emission from metal surfaces under ion impact. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 362 (1814) 177-194 doi:10.1098/rsta.2003.1302
(2004) Preface. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 362 (1819) 1133-1134 doi:10.1098/rsta.2004.1378
 
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